Brooks Instrument SLA5850 Digital Mass Flow Controller
About this part
SLA5850S1FAB1C2A1 is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official Brooks documentation identifies SLA5850 as the lower-flow controller platform in an elastomer-sealed digital thermal mass-flow controller and meter family. Gas, full-scale calibration, fittings, seals, valve behavior, and communications are configured-unit details that should be verified from the unit label or calibration record. Stored Sonisys auction evidence for this exact identifier includes 100 SCCM and 200 SCCM observed range context; one exact-code auction listing also showed H2 and 200 SCCM context, but auction data is not treated as an official universal specification
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model role
SLA5850 is the lower-flow SLA5800 Series mass-flow-controller platform; Brooks documentation pairs it with SLA5860 as the corresponding mass-flow-meter model
Configured part number
SLA5850S1FAB1C2A1
Flow
SLA5850 family range context
Official SLA5800 data-sheet documentation lists SLA5850/SLA5860 flow ranges from 0.003 slpm to 50 slpm N2 equivalent; the exact configured range for this part number must be read from the unit label or calibration record
Gas/range programmability
The SLA5800 platform supports selectable calibration pages and MultiFlo-related gas/range flexibility on applicable configurations
Configuration
Configured-unit rule
Gas, full-scale range, process connections, elastomer materials, valve state, power, and communication options vary by configured code and unit calibration
Performance
Series accuracy context
Current SLA5800 data-sheet documentation lists standard flow accuracy as +/-0.9% of setpoint from 20-100% full scale plus +/-0.18% of full scale below 20% full scale, with 17025-certified device accuracy options also documented
Repeatability and response
SLA5800 data-sheet documentation lists repeatability and reproducibility as 0.20% of setpoint and response time under 1 second for SLA5850/SLA5860 class devices
Stability and sensitivities
SLA5800 data-sheet documentation lists zero stability under +0.2% full scale per year, pressure coefficient +/-0.03% per psi from 0-200 psi N2, and attitude sensitivity under 0.2% full scale after re-zeroing
Pressure
SLA5850 family pressure context
SLA5800 data-sheet documentation lists SLA5850/SLA5860 standard maximum operating pressure as 1500 psi / 103 bar, with optional higher-pressure configurations depending on model and flow conditions
Controls
Digital platform
SLA5800 devices support analog and digital communication options depending on configuration; Brooks documentation includes RS485/analog, Profibus, DeviceNet, EtherCAT, EtherNet/IP, and PROFINET contexts
Electrical
Interface context
SLA5800 documentation lists analog/RS485 variants with a 15-pin male Sub-D connection and digital bus variants with protocol-specific connectors; verify the installed interface from the connector and label
Materials
Family wetted-material context
SLA5800 data-sheet documentation lists stainless steel, 316/316L stainless steel, high-alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, Teflon/Kalrez, and EPDM as family wetted-material options
Environmental
Operating temperature context
SLA5800 data-sheet documentation lists an operating temperature range from -14 C to 65 C, with hazardous-area certifications limited to 0 C to 65 C
Applications
Application domain
Chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas handling applications
Observed variants
Stored auction gas/range combinations
Stored Sonisys auction evidence records 200 SCCM on one exact-code listing and 100 SCCM on one exact-code listing; this is observed configuration evidence, not an official universal specification
