Flow Control

SLA5850S1BAB1C2A1

Brooks Instrument SLA5850 Digital Mass Flow Controller

About this part

SLA5850S1BAB1C2A1 is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official SLA5800 documentation identifies SLA5850 as the lower-flow controller platform in an elastomer-sealed digital thermal mass-flow controller and meter family, with configurable gas, full-scale flow, valve, elastomer seal package, electrical interface, and communication options. Stored Sonisys auction records for this exact identifier include Delta Smart or Delta Smart II wording and HE, O2, 1000 SCCM, and 5000 SCCM context, so the physical unit label remains authoritative for exact gas and calibration

Unit-specific configuration
Observed configuration

Historical listing records identify this part as HE. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberSLA5850S1BAB1C2A1
Product familySLA5800 Series
Device typeMass Flow Controller
Observed gasHE
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeElastomer-sealed digital thermal mass flow controller
Series familyBrooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model roleSLA5850 is the lower-flow SLA5800 Series controller platform; Brooks data-sheet specifications list full-scale flow coverage from 0.003 slpm to 50 slpm N2 equivalent for the SLA5850/SLA5860 class
Configuration
Configured-unit ruleGas, full-scale range, process connections, elastomer materials, valve state, power, and communications vary by configured code and unit calibration
Performance
Series accuracy contextBrooks SLA5800 data-sheet accuracy for SLA5850/SLA5860-class devices is listed as +/-0.9% of set point from 20-100% full scale plus +/-0.18% full scale below 20% full scale, with higher accuracy available for 17025 certified devices
Repeatability and reproducibilityBrooks SLA5800 data sheet lists repeatability and reproducibility as 0.20% of set point
Response timeBrooks SLA5800 data sheet lists less than 1 second settling time to within +/-2% full scale for a 0-100% command step through 100 slpm N2 equivalent, and less than 3 seconds for higher flow ranges
Controls
Digital platformSLA5800 instruments support analog and digital communication options depending on configuration, including RS-485/analog, Profibus, DeviceNet, EtherCAT, EtherNet/IP, and PROFINET variants in current family documentation
Flow
Gas/range programmabilityThe SLA5800 platform supports selectable calibration curves and MultiFlo-related gas/range flexibility on applicable configurations
Applications
Application domainChemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas control applications
Observed variants
Stored auction gas/range combinationsStored Sonisys titles for SLA5850S1BAB1C2A1 include HE, O2, 1000 SCCM nitrogen, and 5000 SCCM nitrogen context; these are observed listing contexts, not official model-wide specifications

Documentation Downloads

Local PDF copies

Part Photos

10 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records4Tracked historical listing records
Historical median price$442.50Based on archived listing records
Recorded price range$75.00 - $900.00Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $78.00 to $870.00. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks SLA5850S1BAB1C2A1 Delta Smart Mass Flow, 1000 SCCM, Nitrogen
  • Brooks SLA5850S1BAB1C2A1 Delta Smart Mass Flow, 5000 SCCM, Nitrogen
  • Brooks SLA5850S1BAB1C2A1 Oxygen (O2) Delta Smart II Mass Flow Controller
  • Brooks SLA5850S1BAB1C2A1 Helium (HE) Delta Smart II Mass Flow Controller

Archived listings

Other Part Numbers & Aliases

SLA5850S1BAB1C2A1Brooks SLA5850S1BAB1C2A1Brooks Instrument SLA5850S1BAB1C2A1