Brooks Instrument SLA5850 Digital Mass Flow Controller
About this part
SLA5850P1MJB1A2A1 is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official Brooks documentation identifies SLA5850 as a controller model in the elastomer-sealed digital thermal mass-flow controller and meter family. Exact gas, full-scale calibration, fittings, seals, valve behavior, and communication details remain configured-unit details that should be verified from the complete unit label or calibration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model role
SLA5850 is the lower-flow SLA5800 Series mass-flow-controller platform; Brooks documentation pairs it with SLA5860 as the corresponding mass-flow-meter model
Flow
SLA5850 family range context
Official SLA5800 data-sheet documentation lists SLA5850/SLA5860 flow ranges from 0.003 slpm to 50 slpm N2 equivalent; the exact configured range for this part number must be read from the unit label or calibration record
Gas/range programmability
The SLA5800 platform supports selectable calibration pages and MultiFlo-related gas/range flexibility on applicable configurations
Configuration
Configured-unit rule
Gas, full-scale range, process connections, seals, valve state, power, and digital communications vary by configured code
Performance
Series accuracy context
Current SLA5800 data-sheet documentation lists standard flow accuracy as +/-0.9% of setpoint from 20-100% full scale plus +/-0.18% full scale below 20% full scale, with 17025-certified device accuracy options also documented
Repeatability and response
SLA5800 data-sheet documentation lists repeatability and reproducibility as 0.20% of setpoint and response time under 1 second for SLA5850/SLA5860 class devices
Controls
Digital platform
SLA5800 devices support analog and digital communication options depending on configuration; Brooks documentation includes RS485/analog, Profibus, DeviceNet, EtherCAT, EtherNet/IP, and PROFINET contexts
Profibus documentation context
Brooks publishes a Profibus supplemental manual for SLA5800 and SLAMf digital mass flow controllers and meters; use it only when the installed interface on the unit label confirms Profibus
Applications
Application domain
Chemical and petrochemical research, laboratory, analytical, fuel-cell, life-science, production, and process gas handling applications
Observed variants
Stored auction gas/range combinations
Stored Sonisys auction titles for SLA5850P1MJB1A2A1 do not provide reliable gas or full-scale range information
