Brooks Instrument SLA5850 Digital Mass Flow Controller
About this part
SLA5850D1BBC1A2A1 is a configured Brooks Instrument SLA5850 digital thermal mass flow controller in the SLA5800 Series. Official Brooks documentation identifies SLA5850 as the lower-flow controller platform in an elastomer-sealed digital thermal mass-flow controller and meter family, with the SLA5850D form documented as a DeviceNet digital-I/O MFC. Gas, full-scale calibration, fittings, seal material, valve behavior, and the remaining configured options should be verified from the unit label or calibration record. Stored Sonisys auction evidence for this exact identifier includes 250 SCCM context, and a exact-code auction listing showed CO2 / 400 SCCM context; these are observed configurations, not official universal specifications
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 250 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLA5800 Series elastomer-sealed digital thermal mass flow controllers and meters
Model role
SLA5850 is the lower-flow SLA5800 Series mass-flow-controller platform; Brooks documentation pairs it with SLA5860 as the corresponding mass-flow-meter model
Configured part number
SLA5850D1BBC1A2A1
Controls
SLA5850D interface context
Official SLA5800 data-sheet documentation identifies SLA5850D as a digital I/O DeviceNet mass flow controller; installed communication details should still be checked against the unit label and connector
Flow
SLA5850 family range context
Official SLA5800 data-sheet documentation lists SLA5850/SLA5860 flow ranges from 0.003 slpm to 30 slpm N2 equivalent, with up to 50 slpm N2 equivalent using the coplanar valve option; exact configured gas and full-scale flow are unit-specific
Gas/range programmability
The SLA5800 platform supports selectable calibration pages and MultiFlo-related gas/range flexibility on applicable configurations
Configuration
Configured-unit rule
Gas, full-scale range, process connections, elastomer materials, valve state, power, and communication options vary by configured code and unit calibration
Performance
Series accuracy context
SLA5800 data-sheet documentation provides family accuracy specifications tied to calibration conditions; exact accuracy should be treated as configuration- and calibration-dependent
Repeatability and response
SLA5800 data-sheet documentation lists repeatability as +/-0.20% of rate and response time under 1 second for SLA5850/SLA5860 class devices under specified conditions
Pressure
SLA5850 family pressure context
SLA5800 data-sheet documentation lists SLA5850/SLA5860 pressure ratings by configuration, including a standard 100 bar / 1500 psi family context and optional higher-pressure body configurations
Electrical
Interface context
SLA5800 documentation includes analog/RS-485 and digital bus variants; DeviceNet variants use protocol-specific power and connector requirements
Materials
Family wetted-material context
SLA5800 data-sheet documentation lists stainless steel wetted parts with elastomer seal options including Viton, Buna-N, Kalrez, Teflon/Kalrez, and EPDM depending on configuration
Environmental
Operating temperature context
SLA5800 data-sheet documentation lists operating and fluid temperature ranges of 0 C to 65 C for the documented family
Applications
Application domain
Advanced gas handling, production, laboratory, analytical, fuel-cell, life-science, chemical, petrochemical, and process gas control applications
Observed variants
Observed gas/range context
Stored Sonisys auction evidence records 250 SCCM on one exact-code listing; one exact-code auction listing showed CO2 / 400 SCCM context. These are observed configurations, not official universal specifications
