Flow Control
GF-125C
Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF-125C is treated as a Brooks Instrument GF125 Series configured metal-sealed thermal mass flow controller identifier. Brooks documentation places GF125 in the GF100-family high-purity mass flow controller platform for semiconductor, MOCVD, thin-film, and other gas-flow applications. The complete unit configuration still depends on the nameplate and suffix/OEM code: stored Sonisys listings show GF-125C units configured for N2 at 92 SCCM, 2600 SCCM, 7200 SCCM, and other customer-specific references
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 2600 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF-125C
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range2600 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Configured GF125 Series metal-sealed thermal mass flow controller or meter |
| Series family | Brooks GF100 / GF101 / GF120 / GF125 / GF126 metal-sealed thermal mass flow controllers and meters |
| Configured part number | GF-125C |
Configuration
| Configured-unit rule | Gas, full-scale range, communication interface, valve state, fitting package, footprint, surface finish, pressure-transient option, and OEM/customer suffix details vary by the complete configured model code |
Applications
| Application domain | Semiconductor, MOCVD, thin-film, solar, and other high-purity gas-flow control applications requiring an all-metal flow path |
Performance
| Flow accuracy context | GF100/GF120/GF125 Analog and DeviceNet data-sheet tables list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration |
| Repeatability and reproducibility | GF100/GF120/GF125 documentation lists +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5% |
| Settling time context | GF125-family published material lists ultra-fast settling-time bins from 300 ms to less than 700 ms, depending on configuration and flow range |
| Pressure transient insensitivity | GF125 is documented as a pressure transient insensitive mass flow controller platform intended to reduce upstream-pressure fluctuation effects |
Flow
| Series-level flow context | GF125-family published material lists full-scale flow rates up to 300 slpm; the exact GF-125C unit range must be read from the nameplate or full configuration code |
| Gas/range programmability | MultiFlo gas and range configurability allows supported GF100-family devices to be reconfigured for many gas and range combinations without removing the device from the gas line |
Controls
| Communication interfaces | Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT documentation for GF100-family devices; the actual interface depends on the configured model code |
Electrical
| Analog connector context | The GF100-family installation manual documents Analog/RS485 configurations using a 9-pin D connector with 0-5 Vdc output and setpoint pins plus RS485 DX+ and DX- pins |
| DeviceNet power context | GF100/GF120/GF125 table context lists DeviceNet power consumption up to 545 mA at +11-25 Vdc and 250 mA at 24 Vdc under typical operating conditions |
Materials
| Wetted path standard | GF125 published material identifies SEMI F20 compliant wetted materials and ultra-high-purity construction |
| Flow path surface finish | GF125 published material lists a 4 microinch Ra surface finish for the wetted flow path |
| Sensor and valve platform | GF125/GF100 family material describes a corrosion-resistant Hastelloy sensor and fast-acting diaphragm-free valve assembly |
Leak integrity
| External leak integrity | GF100/GF120/GF125 table context lists external leak integrity of 1 x 10^-10 atm cc/sec helium |
Environmental
| Operating temperature | GF100/GF120/GF125 data-sheet table context lists 10 C to 50 C operating temperature range |
Mechanical
| Valve and meter options | Documented mechanical configurations include normally closed, normally open, and meter/no-valve variants depending on model and configuration |
Display and diagnostics
| Diagnostics | GF100/GF125 family documentation identifies local display/status information and an independent service or diagnostic port on applicable configurations |
Compliance
| Compliance context | GF100/GF120/GF125 table context references CE EMC testing, RoHS, REACH, and environmental compliance for documented configurations |
Observed variants
| Stored auction gas/range combinations | N2 2600 SCCM, N2 7200 SCCM, and N2 92 SCCM appear in stored Sonisys auction-title evidence for GF-125C |
Documentation Downloads
Local PDF copies
Brooks GF100 Series Analog and DeviceNet Data Sheet
Local PDF download
PDF4.2 MB
Brooks GF100 Series EtherCAT Data Sheet
Local PDF download
PDF1.2 MB
Brooks GF100 Series Installation and Operation Manual
Local PDF download
PDF6.1 MB
Brooks GF100 Series DeviceNet Manual
Local PDF download
PDF1.4 MB
Brooks GF100 Series RS485 L-Protocol Manual
Local PDF download
PDF632 KB
Brooks GF100 Series EtherCAT Manual
Local PDF download
PDF2.8 MB
Brooks MultiFlo Configurator Quick Start Guide
Local PDF download
PDF3.2 MB
Part Photos
14 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records9Tracked historical listing records
Historical median price$1,010.24Based on archived listing records
Recorded price range$225.00 - $2,360.23Low to high recorded listing price
Local documents7PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $365.00 to $2,360.23. Based on 9 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks GF-125C Mass Flow Controller MFC 2600 SCCM N2 AMAT OEM Refurbished
- Brooks GF-125C Mass Flow Controller MFC 2600 SCCM N2 AMAT Refurbished
- Brooks Instrument GF-125C Mass Flow Controller MFC 7200 SCCM N2 OEM Refurbished
- Brooks Instrument GF-125C Mass Flow Controller MFC 0190-32368 OEM Refurbished
- Brooks Instrument GF-125C Mass Flow Controller MFC 0190-32365 Reseller Lot of 14
Archived listings
Other Part Numbers & Aliases
GF-125CBrooks GF-125CBrooks Instrument GF-125C