Sonisys Industrial Part Archive

Flow Control

A2CG3P2BEA

Brooks 5850IA2CG3P2BEA 250 SCCM CO₂ Mass Flow Controller

About this part

Brooks 5850IA2CG3P2BEA is an analog thermal mass flow controller configured for carbon dioxide with a 250 sccm full-scale flow rate. Its labeled process and ambient temperature range is 5°C to 65°C. The 5850i integrates a thermal flow sensor, modulating control valve, and electronic control system for measuring and regulating gas flow

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (2)Photos (1)Listing history
Brooks Instrument 5850i A2CG3P2BEA Thermal gas mass flow controller auction imageArchived part photo · View gallery

Key Facts

ManufacturerBrooks Instrument 5850i
Part numberA2CG3P2BEA
Product family5850I
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
ManufacturerBrooks Instrument
Complete label model5850IA2CG3P2BEA
Model series5850i
Configured Unit
Calibration gasCarbon dioxide (CO₂)
Full-scale flow rate250 sccm
Process/ambient temperature5°C to 65°C
5850i Base Model
Measuring principleThermal mass flow sensing
Accuracy at this flow range±1% of full scale, including linearity, at calibrated conditions
Repeatability0.25% of rate
Response timeLess than 6 seconds to within 2% of full-scale final value for a 0–100% command step
Working pressure1500 psi (10.342 MPa) maximum; installed connection and system limits must also be observed
Allowable differential pressure5 psi minimum and 50 psi maximum; higher differential pressure may be permitted for some gases and ranges with manufacturer approval
Power requirement+15 to +28 VDC; 245 mA at +15 VDC to 370 mA at +28 VDC
Supported command inputsExternal 0–5 VDC or 4–20 mA
Supported output signals0–5 VDC; jumper-selectable 4–20 mA or 0–20 mA

Installation and Service Notes

Brooks specifies upstream filtration and cautions that the integral control valve is not a positive shutoff device.

Recommended upstream filter2 µm for the labeled 250 sccm range, based on Brooks' recommendation for maximum flow rates through 500 sccm
Positive shutoffThe precision control valve is not designed for positive shutoff; install a separate in-line shutoff valve when positive isolation is required
Gas substitutionOperation with a gas other than the calibration gas changes the relationship between output and actual flow. Gas, pressure, flow range, orifice, and restrictor suitability must be evaluated before conversion.

Documentation Downloads

Local PDF copies
Installation and Operation Manual — Brooks Model 5850i, PN 541B108AAG, December 2008 Local PDF download
PDF1.7 MB
 5800E Series Data Sheet, revision 2024-04 Local PDF download
PDF698 KB

Part Photos

1 image

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$699.00Based on archived listing records
Recorded price range$699.00 - $699.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $699.00 to $699.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS MASS FLOW CONTROLLER A2CG3P2BEA

Archived listings

Other Part Numbers & Aliases

A2CG3P2BEA5850IA2CG3P2BEA