Sonisys Industrial Part Archive

Flow Control

5850I

Brooks Instrument Mass Flow Controller

About this part

5850i is a Brooks Instrument mass flow controller used for accurate measurement and rapid control of gas flow in semiconductor, laboratory, analytical, and industrial gas-handling systems. Official Brooks 5850i documentation describes a flow sensor, control valve, and integral electronic control system with soft start, valve override, selectable voltage/current command options, and 50:1 control range. Exact gas, range, fitting, valve state, and configured code must be verified from the unit label or calibration paperwork

Unit-specific configuration
Observed configuration

Historical listing records identify this part as Air at 500 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (2)Photos (110)Listing history
Brooks 5850I 5800E / 5850E Series auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part number5850I
Product family5850I Series
Device typeMass Flow Controller
Observed gasAir
Observed full-scale range500 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeThermal mass flow controller
Series family5800E family / Model 5850i Series
Configuration
Configured-unit ruleGas, full-scale range, fitting, valve state, connector, and seal package vary by configured model code
Flow
5850i flow range context5850i documentation covers low SCCM ranges through 30,000 sccm nitrogen equivalent depending on calibration and configuration
Performance
5850i accuracy context+/-1% full scale including linearity at calibrated conditions; +/-1.5% full scale including linearity for flow ranges greater than 20 slpm
5850i repeatability context0.25% of rate
5850i control range context50:1
Response timeLess than 6 seconds to within 2% of full-scale final value with a 0-100% command step
Pressure
Working pressure1500 psi maximum
Allowable differential pressure5 psi minimum and 50 psi maximum in the 5850i manual, with higher differential pressures configuration-dependent
Environmental
Operating ambient temperature5 to 65 C
Non-operating ambient temperature-25 to 100 C
Leak integrity
Helium leak integrity1 x 10^-9 atm scc/sec helium
Mechanical
Standard gas connections1/4 inch compression fittings standard; 1/8 inch compression, VCO, and VCR connections available by configuration
Electrical
Command inputJumper-selectable 0-5 Vdc or 4-20 mAdc command input
Flow output0-5 Vdc into 2,000 ohms or greater, with jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connectorD-type 15-pin connector (DA-15P)
Power requirement+15 to +28 Vdc, 245 mA at +15 Vdc to 370 mA at +28 Vdc
Controls
Valve behavior contextIntegral control valve and control circuit; valve override can fully open or close the valve independent of setpoint
Soft startSoft start slows introduction of process gas for processes that cannot tolerate rapid flow transition
Applications
Application domainSemiconductor, laboratory, analytical, and process gas handling
Observed variants
Stored auction gas/range combinationsObserved auction variants include oxygen 250/500/1500/4000 SCCM, CO2 100/130/600/2000 SCCM and 3 SLM, air 1/3 SLM, helium 4000 SCCM, hydrogen 0-10 SLM, nitrogen 15000 SCCM, and mixture 30 SLM contexts

Documentation Downloads

Local PDF copies
Brooks 5800E Series Data Sheet Local PDF download
PDF698 KB
 Brooks 5850i Installation and Operation Manual Local PDF download
PDF1.7 MB

Part Photos

110 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records56Tracked historical listing records
Historical median price$441.80Based on archived listing records
Recorded price range$49.00 - $2,450.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $134.50 to $745.00. Based on 56 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks 5850i Mass Flow Controller GAS:Air 500 SCCM
  • Brooks 5850i Mass Flow Controller MFC - Gas: Hydrogen - Flow: 1 SLPM
  • Brooks 5850i Mass Flow Controller GAS:Oxygen 1 SLPM
  • BROOKS 111196 5850i MASS FLOW CONTROLLER 250 SCCM GAS OXYGEN 5850IA1BF3P2BEA
  • Brooks Instrument 5850i Mass Flow Controller Mixture 30 SLPM - 5850IA2CM342BEA
  • Brooks 5850I 5850IA2CM3Y2BAA Mass Flow Controller Gas: Carbon Dioxide

Archived listings

Other Part Numbers & Aliases

5850IBrooks 5850iBrooks Instrument 5850iBrooks Model 5850i5850i Series5850IA