Flow Control

5850IA2CM342BEA

Brooks Instrument 5850i Mass Flow Controller

About this part

5850IA2CM342BEA is a configured Brooks Instrument 5850i thermal mass flow controller identifier. Official Brooks 5850i documentation describes the 5850i as a mass flow controller with a thermal flow sensor, integral control valve, electronic control system, valve override, soft-start behavior, voltage/current command options, and 50:1 control range. Stored auction records and exact listing records associate this configured code with high-flow gas service, including mixture 30 SLPM and other observed listing claims; the physical label and calibration paperwork should be used to confirm the exact gas, range, fittings, and calibration

Unit-specific configuration
Observed configuration

Historical listing records identify this part as Mixture at 30 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part number5850IA2CM342BEA
Product family5850I
Device typeMass Flow Controller
Observed gasMixture
Observed full-scale range30 SLPM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeThermal mass flow controller
Model familyBrooks Instrument Model 5850i Series
Configured part identifier5850IA2CM342BEA
Flow
Flow range family contextBrooks 5850i documentation covers low SCCM ranges through 30,000 sccm nitrogen-equivalent / 30 SLPM high-flow configurations depending on calibration and model code
Measuring principleThermal mass flow sensing with closed-loop control valve regulation
Performance
Accuracy context+/-1% full scale including linearity at calibrated conditions; +/-1.5% full scale including linearity for flow ranges greater than 20 SLPM
Repeatability0.25% of rate
Control range50:1
Response timeLess than 6 seconds to within 2% of full-scale final value with a 0-100% command step
Pressure
Working pressure1500 psi maximum
Allowable differential pressure5 psi minimum and 50 psi maximum in the 5850i manual, with higher differential pressures configuration-dependent
Environmental
Operating ambient temperature5 to 65 C
Non-operating ambient temperature-25 to 100 C
Leak integrity
Helium leak integrity1 x 10^-9 atm scc/sec helium
Mechanical
Standard gas connections1/4 inch compression fittings standard; 1/8 inch compression, VCO, and VCR connections available by configuration
Electrical
Command inputJumper-selectable 0-5 Vdc or 4-20 mAdc command input
Flow output0-5 Vdc into 2,000 ohms or greater, with jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connectorD-type 15-pin connector (DA-15P)
Power requirement+15 to +28 Vdc, 245 mA at +15 Vdc to 370 mA at +28 Vdc
Controls
Valve behaviorIntegral control valve and control circuit; valve override can fully open or close the valve independent of setpoint
Soft startSoft start slows introduction of process gas for processes that cannot tolerate rapid flow transition
Applications
Application domainSemiconductor, laboratory, analytical, and process gas handling
Observed variants
Stored auction gas/range combinationsStored Sonisys auction titles repeatedly describe this configured code as a Brooks 5850i mass flow controller for mixture service at 30 SLPM
Configuration
Configured-unit ruleGas, full-scale range, fitting, valve state, connector, and seal package are configured-unit attributes; confirm the exact values from the unit label or calibration documentation

Documentation Downloads

Local PDF copies

Part Photos

9 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records6Tracked historical listing records
Historical median price$214.98Based on archived listing records
Recorded price range$142.48 - $2,704.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $161.23 to $1,849.50. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument 5850i Mass Flow Controller Mixture 30 SLPM - 5850IA2CM342BEA
  • BROOKS 5850IA2CM342BEA MASS FLOW CONTROLLER NSMP
  • BROOKS 5850IA2CM342BEA MASS FLOW CONTROLLER NSFS

Archived listings

Other Part Numbers & Aliases

5850IA2CM342BEABrooks 5850IA2CM342BEABrooks Instrument 5850IA2CM342BEABrooks 5850i 5850IA2CM342BEABrooks Instrument 5850i 5850IA2CM342BEA5850IA2CM342BEA Mass Flow Controller5850IA2CM342BEA MFC