Flow Control

5850IA1BF3P2BEA

Brooks Instrument 5850i Mass Flow Controller

About this part

5850IA1BF3P2BEA is a configured Brooks Instrument 5850i mass flow controller identifier in the Brooks 5800E elastomer-sealed mass-flow-controller/meter family. Official Brooks 5850i documentation describes a thermal mass flow controller with a flow sensor, integral control valve, and electronic control system, with selectable voltage/current command options, soft start, valve override, and 50:1 control range. Stored Sonisys auction records associate this exact configured identifier with 250 SCCM oxygen context, but gas, calibration conditions, process connections, seal material, and configured options should be verified from the unit label or calibration paperwork

Unit-specific configuration
Observed configuration

Historical listing records identify this part as Oxygen / O2 in 2 stored title matches at 250 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part number5850IA1BF3P2BEA
Product family5850I
Device typeMass Flow Controller
Observed gasOxygen / O2 in 2 stored title matches
Observed full-scale range250 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeThermal mass flow controller
Model familyBrooks Instrument 5850i mass flow controller in the 5800E elastomer-sealed mass-flow-controller/meter family
Configuration
Configured-unit ruleGas, full-scale range, calibration conditions, process connection, seal material, signal option, and valve behavior vary by configured model code and physical unit label
Flow
5850i flow range context5850i documentation covers low SCCM ranges through SLM nitrogen-equivalent context depending on calibration and configuration
Performance
5850i accuracy context+/-1% full scale including linearity at calibrated conditions; +/-1.5% full scale including linearity for flow ranges greater than 20 SLM
5850i repeatability context0.25% of rate
5850i control range context50:1
Response timeLess than 6 seconds to within 2% of full-scale final value with a 0 to 100% command step
Pressure
Working pressure1500 psi maximum
Allowable differential pressure5 psi minimum and 50 psi maximum in the 5850i manual, with higher differential pressures configuration-dependent
Environmental
Operating ambient temperature5 C to 65 C
Non-operating ambient temperature-25 C to 100 C
Leak integrity
Helium leak integrity1 x 10^-9 atm scc/sec helium
Mechanical
Standard gas connections1/4 inch compression fittings standard; 1/8 inch compression, VCO, and VCR connections available by configuration
Electrical
Command inputJumper-selectable 0-5 Vdc or 4-20 mAdc command input
Flow output0-5 Vdc into 2,000 ohms or greater, with jumper-selectable 4-20 mAdc or 0-20 mAdc current output
Electrical connectorD-type 15-pin connector (DA-15P)
Power requirement+15 to +28 Vdc, 245 mA at +15 Vdc to 370 mA at +28 Vdc
Controls
Valve behavior contextIntegral control valve and control circuit; valve override can fully open or close the valve independent of setpoint
Soft startSoft start slows introduction of process gas for processes that cannot tolerate rapid flow transition
Applications
Application domainSemiconductor, laboratory, analytical, and process gas handling
Observed variants
Stored auction gas/range combinationsStored Sonisys auction titles identify this exact configured identifier with 250 SCCM context across 3 title matches, including oxygen/O2 wording in 2 title matches; gas and range were not verified from official documentation

Documentation Downloads

Local PDF copies

Part Photos

24 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records6Tracked historical listing records
Historical median price$649.50Based on archived listing records
Recorded price range$199.99 - $2,105.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $224.99 to $2,105.00. Based on 6 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument 5850i Mass Flow Controller 250 SCCM Model: 5850IA1BF3P2BEA
  • BROOKS 5850i MASS FLOW CONTROLLER 250 SCCM GAS O2 5850IA1BF3P2BEA
  • BROOKS 111196 5850i MASS FLOW CONTROLLER 250 SCCM GAS OXYGEN 5850IA1BF3P2BEA

Archived listings

Other Part Numbers & Aliases

5850IA1BF3P2BEABrooks 5850IA1BF3P2BEABrooks Instrument 5850IA1BF3P2BEA