Flow Control
MF51
Brooks Instrument MF Smart Series Mass Flow Controller
About this part
MF51 is a Brooks Instrument MF Smart Series thermal mass flow controller model. Official Brooks Profibus documentation lists 5851/MF51 as a Brooks Smart Mass Flow Controller with an electro-mechanical control valve and a 20 to 100 ln/min full-scale flow-range class. Gas, full-scale calibration, fittings, valve behavior, communication option, and approval status remain configured-unit details that should be verified from the complete model code, physical label, and calibration record
Unit-specific configuration
Historical listing records identify this part as AIR at 30 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | MF Smart Series thermal mass flow controller |
| Official model identity | Brooks documentation lists 5851/MF51 as a Brooks Smart Mass Flow Controller model |
| Primary function | Measures gas mass flow and controls gas flow to a command setpoint through an electro-mechanical control valve |
| MF51 flow-range class | 20 to 100 ln/min full-scale flow range; normal liter reference conditions are 0 C and 1013.25 mbar in the Brooks documentation |
| Smart mass-flow platform | Brooks Smart Mass Flow documentation describes selectable analog setpoint and flow signals, adaptive signal filtering, soft-start, valve override, totalizer, alarms, self-diagnostics, and selectable communication protocol options depending on configuration |
| Configured-unit rule | Gas, full-scale flow, calibration conditions, process connections, seal material, valve type, power, communication option, and safety approval vary by configured model code and physical unit label |
| Stored auction gas/range combinations | Stored Sonisys auction context includes AIR 30 SLM examples; this is observed listing context, not an official model-wide specification |
Documentation Downloads
Local PDF copiesPart Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $180.00 to $1,220.00. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks MF Series Mass Flow Controller MFC MF51 - 30 SLPM - Air
- Lot Of 15 Brooks MF Series Mass Flow Controller MFC MF51 - 30 SLPM - Air