Flow Control

MF51S

Brooks Instrument MF Series Smart Mass Flow Controller

About this part

MF51S is a Brooks Instrument MF Series Smart Mass Flow controller model. Official Brooks Profibus documentation lists MF51S/AD as a mass flow controller with a 20 to 100 ln/min full-scale flow-range class, while MF Series data-sheet evidence places the model in the weatherproof Brooks Smart Mass Flow product family. Gas, full-scale calibration, fittings, valve behavior, communication option, and approval status remain configured-unit details that should be read from the complete model code and physical label

Unit-specific configuration
Observed configuration

Historical listing records identify this part as CO2 at 50 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberMF51S
Product familyConfiguration-specific
Device typeMass Flow Controller
Observed gasCO2
Observed full-scale range50 SLPM
Configuration statusVerify from unit label
Application classIndustrial automation and process equipment
CategoryFlow Control

Specifications

Identification
Device typeMF Series smart thermal mass flow controller
Series familyBrooks MF50S-MF64S Smart Mass Flow meters/controllers family
Official model-listing contextBrooks Profibus documentation lists MF51S/AD as a mass flow controller
Flow
MF51S/AD flow-range class20 to 100 ln/min full-scale flow range; normal liter reference conditions are 0 C and 1013.25 mbar in the Brooks documentation
Function
Primary functionMeasures gas mass flow and controls gas flow to a command setpoint through an integral control valve
Controls
Smart mass-flow platformBrooks Smart Mass Flow documentation describes adaptive control, selectable analog signals, digital communication options, soft-start, totalizer, alarms, and self-diagnostics depending on configuration
Enclosure
Environmental protection contextMF Series data-sheet evidence identifies IP65 and NEMA 4X weatherproof protection context for the MF Series
Hazardous-area context
Zone 2 availabilityMF Series data-sheet evidence identifies Zone 2 hazardous-area certification availability for applicable configurations
Mechanical
Connection-option contextBrooks Profibus documentation lists MF50/MF60/MF51/MF61 connection-code availability including 9/16-18 UNF, tube compression, VCR, VCO, NPT, BSP, and related configured options
Configuration
Configured-unit ruleGas, full-scale flow, calibration conditions, process connections, seal material, valve type, power, communication option, and safety approval vary by configured model code and physical unit label
Observed variants
Stored auction gas/range combinationsStored Sonisys auction context includes CO2 and AIR examples, including one AIR 75 SLM listing and one CO2 listing with 50 SLPM item-specific wording; these are observed configurations, not official model-wide specifications

Documentation Downloads

Local PDF copies

Part Photos

1 image

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records4Tracked historical listing records
Historical median price$650.00Based on archived listing records
Recorded price range$200.00 - $2,995.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $335.00 to $2,291.50. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument MF51S Smart Mass Flow

Archived listings

Other Part Numbers & Aliases

MF51SBrooks MF51SBrooks Instrument MF51S