CMX1M11D2VF is a configured Brooks Instrument XacTorr CMX Series digital capacitance manometer / capacitance diaphragm gauge. Official Brooks CMX documentation identifies CMX1 as the CMX45 temperature family and M11 as the 100 mTorr full-scale pressure range. Stored auction titles describe this configured unit as a 100 mTorr, 45 C, Model CMX45 gauge; the remaining suffix should be verified from the physical label for connector, fitting, calibration orientation, and compliance details
Configurations vary. Verify the exact unit before choosing a replacement.
Device typeXacTorr CMX45 heated digital capacitance manometer
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
Device type
Digital capacitance manometer / capacitance diaphragm gauge
Series family
Brooks Instrument XacTorr CMX Series
Configured part identifier
CMX1M11D2VF
Temperature model code
CMX1 corresponds to CMX45 / 45 C sensor temperature in the official Brooks CMX ordering table
Pressure
Configured full-scale range
M11 corresponds to 100 mTorr full-scale pressure range in the official Brooks CMX ordering table
Series full-scale range options
Official CMX data sheet lists full-scale ranges from 0.1 Torr through 1000 Torr, with pascal equivalents available
Over-pressure limit
17 psia or 125% of full scale, whichever is greater
Performance
CMX45 accuracy
+/-0.15% of reading from 10% of full scale to full scale unless otherwise specified
Pressure response time
40 msec
Warm-up time
2 hours; 4 hours for full-scale ranges less than or equal to 1 Torr
Temperature
Sensor temperature options
Unheated, 45 C, 100 C, and 160 C CMX family options
CMX45 ambient operating temperature
15 C to 35 C
Materials
Wetted materials
Inconel and/or AISI 316L stainless steel
Electrical
Analog output context
Analog CMX models provide 0-10 Vdc output into a 5k ohm load
Communication options
Analog, DeviceNet, and RS-485 diagnostic communication options depending on configured model
Connector options
Official CMX data sheet lists 9-pin male Sub-D, 15-pin male Sub-D, DeviceNet 5-pin Eurofast, and 2.5 mm RS-485 diagnostic port options depending on model
Power
CMX45 power context
+24 Vdc +/-10% at 400 mA or +/-15 Vdc at 300 mA, with relay-equipped 15-pin models requiring additional current when relays are energized
Compliance
Series compliance context
Official CMX data sheet lists EMC Directive 2014/30/EU, RoHS Directive 2011/65/EU and 2015/863/EU, and REACH EC 1907/2006 context
Applications
Application domain
Process vacuum measurement for semiconductor and industrial vacuum systems
Configuration
Configured-unit rule
Pressure range, fitting, electrical connector, communication interface, calibration orientation, relay configuration, and compliance suffix should be verified from the physical label
