Vacuum and Cryogenics
CMX45
Brooks Instrument XacTorr Heated Digital Capacitance Manometer
About this part
CMX45 is the 45 deg C member of the Brooks Instrument XacTorr CMX Series heated digital capacitance manometer family. It is an absolute-pressure vacuum gauge platform for semiconductor and process-vacuum measurement, with configured pressure range, fitting, electrical interface, relay options, compliance marking, and calibration orientation encoded in the full CMX model number. Sonisys auction history includes CMX45 examples ranging from 100 mTorr through 500 Torr and includes analog, RS-485, and DeviceNet context
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberCMX45
Product familyCMX45
Device typeHeated digital capacitance manometer
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
| Part identifier | CMX45 |
| Device type | Heated digital capacitance manometer / capacitance diaphragm gauge |
| Product family | Brooks XacTorr CMX Series |
| Model temperature | CMX45 is the 45 deg C operating-temperature model |
Measurement
| Pressure measurement type | Absolute pressure measurement with capacitance diaphragm sensing |
| Gas dependency | Capacitance manometer measurement is independent of gas composition |
| Measurement range | CMX family documentation states four decades of measurement range from full scale |
| Closed-loop control range | CMX family documentation states up to three decades of control range in closed-loop pressure-control systems |
Configured ranges
| Full-scale pressure options | Model-code options include 100 mTorr, 250 mTorr, 500 mTorr, 1 Torr, 2 Torr, 5 Torr, 7.5 Torr, 10 Torr, 20 Torr, 50 Torr, 100 Torr, 200 Torr, 300 Torr, 500 Torr, and 1000 Torr depending on configuration |
Accuracy
| Typical family accuracy | CMX documentation lists range-dependent accuracy values, commonly 0.15 percent or 0.25 percent of reading for many ranges |
Thermal
| Ambient operating temperature | 15 deg C to 35 deg C for CMX45 |
Materials
| Exposed wetted materials | Inconel and/or AISI 316L stainless steel |
Mechanical
| Sensor volume | 17 cc |
| Approximate shipping weight | 1.40 lb / 726 g |
Pressure
| Overpressure limit | 17 PSIA or 125 percent of full scale, whichever is greater |
Electrical
| Analog output | 0 to 10 VDC pressure output |
| Analog connector options | 9-pin male D-sub or 15-pin male D-sub depending on configuration |
Communications
| RS-485 service port | 2.5 mm mini jack RS-485 communications port |
| DeviceNet option | DeviceNet configurations use a 5-pin Eurofast connector with 9-pin female D-sub analog connection |
| DeviceNet network size | DeviceNet documentation lists up to 64 nodes |
Interfaces
| Digital functions | DeviceNet digital functions include reading pressure, setting zero, resetting factory defaults, reporting run time, and changing address or baud rate |
Fittings
| Fitting options | Configuration options include 0.5 inch OD tube stub, KF flanges, VCR female fittings, and Mini-CF variants |
Compliance
| Certification context | CMX documentation identifies CE compliance to EMC Directive 89/336/EEC; RoHS-compliant model ordering uses an R option |
Configuration
| Configured-unit rule | The exact pressure range, fitting, electrical connector, relay option, compliance option, and calibration orientation must be read from the full model code and physical label |
Applications
| Application domain | Semiconductor vacuum measurement, process-vacuum pressure measurement, thin-film tools, and pressure-control applications |
Documentation Downloads
Local PDF copiesPart Photos
35 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records25Tracked historical listing records
Historical median price$450.00Based on archived listing records
Recorded price range$49.00 - $2,495.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $209.00 to $694.90. Based on 25 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS CAPACITANCE MANOMETER INSTRUMENTS XACTORR CMX45
- Brooks CMX45 Digital Xactor Capacitance Manometer maintenance required
- New Brooks Instruments CMX45 Digital Xactor Capacitance Manometer 50 Torr Unit
- NEW Lam Research 853-051187-703 Gas Control Brooks CMX45 Manometer Fujikin Valve
- BROOKS CMX45 XacTorr Digital Vacuum Capacitance Manometer 10 Torr Heated Gauge
- BROOKS XacTorr CAPACITANCE MANOMETER 200 Torr CMX45
Archived listings
Other Part Numbers & Aliases
CMX45Brooks CMX45Brooks Instrument CMX45Brooks Instruments CMX45XacTorr CMX45Brooks XacTorr CMX45CMX1M11D2VFCMX1T0122CMX1T15PN2XCMX1T22LN2XCMX1T25PN2X