Vacuum and Cryogenics
CMX160
Brooks Instrument XacTorr Heated Digital Capacitance Manometer
About this part
CMX160 is the 160 deg C member of the Brooks Instrument XacTorr CMX Series heated digital capacitance manometer family. It is an absolute-pressure vacuum gauge platform for semiconductor and process-vacuum measurement, with exact pressure range, fitting, electrical interface, relay options, compliance marking, and calibration orientation encoded in the full CMX model number. Sonisys auction history includes CMX160 examples with 1 Torr, 2 Torr, 10 Torr, and 1000 Torr context
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberCMX160
Product familyCMX160
Device typeGauge
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryVacuum and Cryogenics
Specifications
Identification
| Part identifier | CMX160 |
| Device type | Heated digital capacitance manometer / capacitance diaphragm gauge |
| Product family | Brooks Instrument XacTorr CMX Series |
| Model temperature | CMX160 is the 160 deg C operating-temperature model |
Measurement
| Pressure measurement type | Absolute pressure measurement with capacitance diaphragm sensing |
| Gas dependency | Capacitance manometer measurement is independent of gas composition |
| Full-scale pressure options | CMX ordering documentation lists 100 mTorr through 1000 Torr family options; availability depends on temperature selection and exact model code |
| Observed CMX160 ranges | Stored auction titles identify CMX160 examples at 1 Torr, 2 Torr, 10 Torr, and 1000 Torr |
Accuracy
| CMX160 accuracy | CMX data-sheet specifications list CMX160 accuracy as +/-0.25 percent of reading |
Response
| Pressure response time | CMX data-sheet specifications list 40 ms pressure response time |
Thermal
| Sensor temperature | 160 deg C |
| Ambient operating temperature | 15 deg C to 35 deg C for CMX160 |
| Warm-up time | CMX family specifications list 2 hours warm-up, or 4 hours for full-scale ranges less than or equal to 1 Torr |
Materials
| Wetted materials | Inconel and/or AISI 316L stainless steel |
Pressure
| Overpressure limit | 17 psia or 125 percent of full scale, whichever is greater |
Electrical
| Analog output | 0 to 10 VDC pressure output |
| Analog connector options | 9-pin male D-sub or 15-pin male D-sub depending on configuration |
| Power consumption for CMX160 | +24 VDC +/-10 percent at 1 A, or +/-15 VDC at 1 A |
Communications
| Digital interfaces | CMX family documentation includes RS-485 diagnostic communications and DeviceNet options depending on configuration |
| DeviceNet option | DeviceNet configurations use a 5-pin Eurofast connector with 9-pin D-sub analog connection |
| DeviceNet network size | CMX DeviceNet documentation lists up to 64 nodes |
Fittings
| Fitting options | Configuration options include 0.5 inch OD tube stub, KF-10, KF-16, KF-25, 8 VCR female, 4 VCR female, and Mini-CF fittings |
Compliance
| Compliance context | Current CMX data-sheet specifications list EMC, RoHS, and REACH compliance context; exact compliance marking should be verified from the unit label |
Configuration
| Configured-unit rule | The exact pressure range, fitting, connector, relay option, calibration orientation, and compliance option must be read from the full CMX model code and physical label |
Applications
| Application domain | Semiconductor vacuum measurement, thin-film process vacuum, LPCVD, metal CVD, process-vacuum pressure measurement, and pressure-control applications |
Documentation Downloads
Local PDF copiesPart Photos
14 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records7Tracked historical listing records
Historical median price$340.88Based on archived listing records
Recorded price range$85.00 - $1,200.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $139.00 to $873.06. Based on 7 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS XacTorr Capacitance Manometer 1000Torr CMX160 160C CMX 160
- BROOKS INSTRUMENTS CMX160 XACTORR CAPACITANCE MANOMETER 10 TORR
- Brooks Instruments Mod: CMX160 PN: CMX3T0284V 2Torr 160*C
- New BROOKS Digital XacTorr Capacitance Manometer CMX160 P/N: CMX3T012N 1 Torr
Archived listings
Other Part Numbers & Aliases
CMX160Brooks CMX160Brooks Instrument CMX160Brooks Instruments CMX160XacTorr CMX160Brooks XacTorr CMX160