Flow Control
5853S
Brooks Instrument Smart Mass Flow Controller
About this part
5853S is a Brooks Instrument 5800-S Smart-Series elastomer-sealed thermal mass flow controller for gas flow measurement and control. Official Brooks 5800-S documentation explicitly covers mass flow controller models 5850S, 5851S, and 5853S and places 5853S in the high-flow controller row paired with 5863S meter models. Gas calibration, full-scale range, fittings, pressure conditions, valve option, signal option, Profibus option, and customer suffix details remain configured-unit details that must be verified from the physical unit label and calibration paperwork
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Oxygen. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part number5853S
Product family5850S
Device typeMass Flow Controller
Observed gasOxygen
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Smart-Series digital thermal mass flow controller for gases |
| Manufacturer | Brooks Instrument |
| Series family | Brooks 5800-S Smart-Series elastomer-sealed thermal mass flow meters and controllers |
| Official covered controller models | Brooks 5800-S documentation covers controller models 5850S, 5851S, and 5853S |
| Related meter model | Brooks documentation pairs 5853S controller range context with 5863S mass flow meter models |
Function
| Primary function | Measures gas mass flow with thermal sensing electronics and controls flow using an integral control-valve module |
Flow
| 5853S N2-equivalent full-scale range context | Brooks 5800-S documentation lists the 5853S / 5863S row at 100 to 2500 ln/min full-scale range, referenced to normal conditions of 0 C and 1013.25 mbar |
Pressure
| 5853S pressure rating context | Brooks 5800-S documentation lists the 5853S / 5863S row at 70 bar pressure rating, with PED module category dependent on connection configuration |
| 5853S maximum differential pressure context | Brooks 5800-S documentation notes maximum delta P for 5853S is 20 bar |
Performance
| Flow accuracy context | Brooks 5800-S documentation lists +/-0.7% of rate and +/-0.2% full scale at calibration conditions, with +/-1.0% full scale for 5863/5853 flow rates above 1100 ln/min |
| Repeatability | Brooks 5800-S documentation lists +/-0.25% of rate |
| Rangeability and controllability | Brooks 5800-S documentation lists 50:1 rangeability within specified accuracy and 100:1 total controllability |
| 5853S controller settling time context | Brooks 5800-S documentation lists model 5853S controller settling time as 3 seconds, with 1 second available on request |
Environmental
| Ambient and process-gas temperature context | Brooks 5800-S documentation lists both ambient and process gas temperature at 0 C to 70 C |
Leak integrity
| External leak integrity context | Brooks 5800-S documentation lists outboard helium leak integrity of 1 x 10^-9 mbar l/sec |
Materials
| Wetted materials context | Brooks 5800-S documentation lists stainless steel wetted construction with configured Viton, Buna-N, PTFE/Kalrez, or EPDM seals |
Mechanical
| Process connection context | Brooks 5800-S documentation lists NPT(F), tube compression, VCR/VCO downport, and DIN or ANSI flange options; the exact 5853S fitting must be verified from the configured model code and physical unit |
Electrical
| Main connector context | Brooks 5800-S documentation identifies a 15-pin D-type / Sub-D connector with gold-plated contacts for Smart TMF electrical interfacing |
| Setpoint and output context | Brooks 5800-S documentation lists selectable 0-5 Vdc, 1-5 Vdc, 0-20 mA, and 4-20 mA setpoint/input and analog flow-output contexts; the ordered signal option must be verified per unit |
| Controller power context | Brooks 5800-S documentation lists controller power as +15 to +28 Vdc or +/-15 Vdc depending on configuration, with current draw affected by Profibus and valve override use |
Digital communication
| Smart-Series communication context | Brooks 5800-S documentation lists RS-232 or RS-485 communication with selectable baud rates, and Profibus-DP up to 12 Mbit/sec on applicable configurations |
Maintenance
| 5853S valve assembly caution | Brooks 5800-S documentation states the 5853S control-valve assembly uses an axially mounted main valve driven by a top-mounted pilot valve and instructs that the main valve should not be disassembled |
Configuration
| Configured-unit rule | Gas calibration, full-scale flow, fittings, pressure rating details, valve state, seal package, analog/digital interface option, Profibus option, and customer-specific suffixes vary by configured model code and physical nameplate |
Applications
| Application domain | Gas mass-flow control in semiconductor manufacturing, analytical instrumentation, laboratory, process, and industrial gas-handling systems |
Compatibility
| Verification boundary | Do not assume interchangeability with 5850S, 5851S, 5863S meters, 5853E, 5853I, SLA5853, or any configured Brooks unit without checking gas, range, fittings, signal option, pressure conditions, wiring, and calibration |
Observed variants
| Stored auction gas/range contexts | Stored Sonisys auction titles include oxygen, N2, and air 1200 SLPM configured-unit contexts; these are observed listing contexts, not model-wide official specifications |
Documentation Downloads
Local PDF copiesPart Photos
15 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records16Tracked historical listing records
Historical median price$542.75Based on archived listing records
Recorded price range$75.00 - $1,500.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $137.00 to $1,450.00. Based on 16 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument 5853S Mass flow controller, 1aE
- Brooks 5853S Smart Mass Flow Controller 1200 SLPM Air - Untested As-Is
Archived listings
Other Part Numbers & Aliases
5853SBrooks 5853SBrooks Instrument 5853S