6256S is an archive-observed Brooks Instrument Smart Mass Flow configured thermal mass flow controller used in semiconductor gas-delivery service. Stored Sonisys auction titles and inspected stored images identify 6256S units with Brooks Instrument markings, SMART MASS FLOW labels, 15-pin D-sub electrical connectors, and configured gas/range labels such as SiH4 500 SCCM, NH3 500 SCCM, O2 25 SLM, NF3 15 SLM, N2 10 SLM, and other process-gas variants. Brooks official documentation does not appear to publish an exact 6256S-named PDF, so the hosted Brooks Smart-Series manual is used as family-level context only; each physical unit should still be verified from its nameplate and full configured model code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 10 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Archive-observed Brooks Smart Mass Flow configured thermal mass flow controller
Model marking
Stored Sonisys images show BROOKS 6256S, SMART MASS FLOW, and MODEL: 6256S markings on inspected units
Manufacturer marking
Stored label imagery identifies Brooks Instrument, Hatfield PA 19440 USA
Official family context
Brooks Smart-family documentation places MF Smart Series among elastomer-sealed thermal mass flow controller families; the Brooks 5800-S Smart-Series manual covers Smart Mass Flow meters and controllers including 5850S, 5851S, and 5853S controller models
Configuration
Configured-unit rule
6256S is not one fixed gas/range specification; gas, full-scale flow, fittings, valve state, seal package, and OEM/customer part number vary by unit
Observed full model codes
6256SBZVCLA, 6256SCZVCLA, 6256SCZVCLAC, 6256SCZVCMAC, and 6256SCZ10 appear as observed configured codes associated with 6256S units
Function
Smart-series control architecture
The Brooks 5800-S Smart-Series manual describes microprocessor-based Smart Mass Flow controllers with thermal mass flow sensing, integral control-valve modules, adaptive valve control, selectable setpoint sources, valve override, and low-flow cutoff
Controls
Setpoint and output context
The Brooks Smart-Series manual lists selectable analog signal modes of 0-5 Vdc, 1-5 Vdc, 0-20 mA, and 4-20 mA with digital communication simultaneously available; actual 6256S wiring and options must be verified on the unit
Digital communication context
The Brooks Smart-Series manual describes RS-232 and RS-485 communication, Smart Control/Smart DDE/Smart Service software context, and Profibus-DP support on applicable configurations
Electrical
Electrical connector evidence
15-pin D-sub connector observed in stored Sonisys images for inspected 6256S units
Performance
Family response context
The Brooks Smart-Series manual lists standard controller settling time of 1 second for 5850S/5851S and 3 seconds for 5853S; use this as family context only unless the exact 6256S configuration is verified
Flow
Smart-series reference flow ranges
The Brooks Smart-Series manual lists N2-equivalent controller full-scale ranges of 0.003 to 30 ln/min for 5850S, 20 to 100 ln/min for 5851S, and 100 to 2500 ln/min for 5853S; 6256S auction variants must be read from their own labels
Pressure
Smart-series reference pressure ratings
The Brooks Smart-Series manual lists pressure ratings up to 100/300 bar for 5850S/5860S, 100 bar for 5851S/5861S, and 70 bar for 5853S/5863S; do not apply a pressure rating to a 6256S unit without confirming its full configuration
Environmental
Smart-series operating temperature context
The Brooks Smart-Series manual lists ambient and process-gas temperature of 0 C to 70 C for the documented 5800-S Smart-Series models
Mechanical
Process fitting evidence
Configured 6256S variants can appear with process fittings such as 0.250 inch VCR; fitting style must be verified from the specific unit
Seal package evidence
Configured 6256S variants may differ by seal package; verify elastomer versus metal-sealed construction from the full model code, label, or unit documentation
Applications
Application domain
Semiconductor process-gas delivery and mass flow control; stored auction evidence includes process gases such as N2, N2O, O2, SiH4, He, NF3, Ar, CF4, and NH3
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records167Tracked historical listing records
Historical median price$143.20Based on archived listing records
Recorded price range$98.00 - $1,260.10Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $120.76 to $179.00. Based on 167 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks 6256S Mass Flow Controller MFC 500SCCM NF3
BROOKS MASS FLOW CONTOLLER SIH4 500 SCCM 6256S
BROOKS MFC 6256S NH3 500 SCCM
BROOKS MFC 6256S N2 10 SLM
BROOKS MFC 6256S O2 25 SLM
Brooks 6256S Mass Flow Controller MFC 6256S NF3 15 SLPM
