MF50S/AC1DA1ID0KA1B1 is a configured Brooks Instrument MF50S Smart Mass Flow controller. The MF50S belongs to the Brooks MF Series Smart Mass Flow controller family, a weatherproof IP65 / NEMA 4X elastomer-sealed thermal mass flow platform based on Brooks 5850S-5864S Smart Mass Flow products. Sonisys auction history shows this configured identifier in 3/8 inch N2 units with 3 SLPM and 12 SLPM observed ranges; those values describe stored configured-unit examples, not every MF50S/AC1DA1ID0KA1B1 unit
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
MF50S/AC1DA1ID0KA1B1
Device type
Smart thermal mass flow controller
Series family
Brooks MF Series Smart Mass Flow controllers, models MF50S-MF64S
Legacy Brooks status
Brooks lists the MF Smart Series as legacy elastomer-sealed thermal mass flow controllers
Flow
MF50S controller flow range
0.003 to 30 ln/min nitrogen equivalent for the MF50S controller family
MF50S/AC model-code flow band
MF50S/AC is listed for 0.008 to 30 ln/min full-scale flow ranges
Applications
Application domain
Industrial process gas control, biotech process gas control, outdoor or wash-down process environments, and general gas-flow control applications
Performance
Flow accuracy
+/-0.7% of rate and +/-0.2% full scale at calibration conditions, with +/-0.5% of rate and +/-0.1% full scale available on request up to 100 ln/min
Repeatability
+/-0.25% of rate
Rangeability
50:1 within specified accuracy
Controllability
100:1 total operating range
Long-term stability
Less than +/-0.5% of rate per year
Temperature effect
Less than 0.015% per deg C of rate shift from original calibration over 0 C to 70 C
Response and settling
Standard response and settling time are listed as 1 second; response and settling better than 0.2 second are available on request
Controls
Control platform
Microprocessor-based Smart electronics with adaptive control, selectable soft start, linear ramp, adaptive valve control, and self-diagnostics
Calibration storage
Up to ten different calibration curves are programmable
Analog setpoint input
0-5 Vdc, 1-5 Vdc, 0-20 mA, or 4-20 mA depending on configuration
Analog output
0-5 Vdc, 1-5 Vdc, 0-20 mA, or 4-20 mA depending on configuration
Communications
Digital communication
RS-232, RS-485, and Profibus-DP options depending on configuration
Digital baud rates
RS-232/RS-485 baud-rate options include 1200, 2400, 3600, 4800, 7200, 9600, 19.2k, and 38.4k baud; Profibus-DP supports up to 12 Mbit/sec
Power
Power requirements
+15 Vdc to +28 Vdc
MF50S/MF51S/MF53S controller consumption
+24 Vdc at 140 mA or +15 Vdc at 185 mA, with higher consumption when valve override is active
Environmental
Ambient and process gas temperature
0 C to 70 C
Enclosure protection
IP65 and NEMA 4X weatherproof protection
Compliance
Certifications
MF Series documentation lists CE certification and Zone 2 hazardous-area certification context
Pressure
MF50S pressure rating
100 bar pressure rating for MF50S flow ranges in the MF Series data sheet
Integrity
Outboard leak integrity
1 x 10^-9 mbar l/sec helium
Materials
Wetted construction
Stainless steel with Viton, Buna-N, PTFE/Kalrez, or EPDM seals depending on configuration
Connections
Mechanical connections
NPT female, tube compression, VCR, VCO, and optional flanged DIN or ANSI connections depending on configuration
Configuration
Configured-unit rule
Gas, full-scale flow, seal material, valve, mechanical connection, analog I/O, digital communication, and safety certification options vary by configured model code and physical label