Flow Control
SLA7820D1EGG1A2A1
Brooks Instrument SLA7820D DeviceNet Pressure Controller
About this part
SLA7820D1EGG1A2A1 is a configured Brooks Instrument SLA7820D pressure-controller identifier. Official Brooks web sources confirm Brooks' flow and pressure-control product domain and list SLA7800/SLA7900 DeviceNet system-file context for mass-flow and pressure devices, while legacy Brooks-authored SLA7810/SLA7820 manual context identifies SLA7820D as a Digital I/O DeviceNet pressure-controller model. Stored Sonisys auction records for this exact configured code include 200 SCCM context; that value is retained only as observed listing evidence and should be verified from the physical unit label or calibration record
Unit-specific configuration
Historical listing records identify this part as 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | Metal-sealed digital pressure controller |
| Series family | Brooks SLA7810/SLA7820 metal-sealed pressure controller family |
| Configured model code | SLA7820D1EGG1A2A1 is treated as a configured SLA7820D-unit identifier; the suffix should be matched to the physical label or calibration record before assigning gas, pressure range, fittings, valve, or calibration details |
| Model role | Legacy Brooks-authored SLA7810/SLA7820 documentation identifies SLA7820D as a Digital I/O DeviceNet pressure-controller model |
| DeviceNet context | Brooks' official DeviceNet system-file page lists SLA7800 and SLA7900 series files for use with mass-flow and pressure devices; installed network details must still be verified from the unit and host system |
| Configured-unit rule | Gas, full-scale flow, pressure range, process connections, valve configuration, calibration, power, and communication details vary by configured unit and must be verified from the physical device |
| Application domain | High-purity gas pressure control in semiconductor gas handling, process, laboratory, and industrial gas systems |
| Stored auction gas/range combinations | Stored Sonisys auction titles for this exact configured code include 200 SCCM context; this is observed listing evidence, not an official stock specification |
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $145.76 to $190.02. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Delta Class Smart Mass Flow Durchflussregler SLA7820D1EGG1A2A1 0-200 SCCM
- BROOKS INSTRUMENT SLA7820D1EGG1A2A1 mass flow controller SLA7820D1EGG1A2A1