Flow Control
SLA7820D
Brooks Instrument SLA7820 Metal-Sealed DeviceNet Pressure Controller
About this part
SLA7820D is a Brooks Instrument SLA7820 metal-sealed pressure controller model identifier. Legacy Brooks-authored SLA7810/SLA7820 documentation found identifies SLA7820D as a Digital I/O DeviceNet upstream pressure controller, while Brooks' current official site and document library support the pressure-control manufacturer context but did not surface an official exact SLA7820D PDF. Stored Sonisys auction records for this exact short code include N2 1000 SCCM, 2000 SCCM, and 5000 SCCM contexts; those values are retained only as observed configuration evidence and should be verified from the physical unit label or calibration record
Unit-specific configuration
Historical listing records identify this part as N2 at 2000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Device type | Metal-sealed digital pressure controller |
| Series family | Brooks SLA7810/SLA7820 metal-sealed pressure controller family |
| Model role | Legacy Brooks-authored SLA7810/SLA7820 documentation identifies SLA7820D as a Digital I/O DeviceNet upstream pressure controller |
| SLA7810/SLA7820 family range context | Legacy Brooks-authored SLA7810/SLA7820 data-sheet context lists model-family flow ranges from 0-3 sccm to 0-30 slpm N2 equivalent; the exact configured range for a physical SLA7820D must be verified from its label or calibration record |
| Configured-unit rule | Gas, full-scale flow, pressure range, process connections, valve configuration, calibration, power, and communication details vary by configured unit and must be verified from the physical device |
| Communication context | SLA7820D model-level documentation identifies a DeviceNet digital I/O pressure-controller configuration; use installed network details only when the connector, label, or system documentation confirms them |
| Application domain | High-purity gas pressure control in semiconductor gas handling, process, laboratory, and industrial gas systems |
| Stored auction gas/range combinations | Stored Sonisys auction titles for this exact short code record N2 1000 SCCM, N2 2000 SCCM, and N2 5000 SCCM contexts; these are observed listing configurations, not official stock specifications |
Part Photos
8 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $149.99 to $149.99. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks SLA7820D Digital MFC Mass Flow Controller Gas N2 Range 1000 SCCM
- Brooks SLA7820D Digital MFC Mass Flow Controller Gas N2 Range 2000 SCCM
- Brooks SLA7820D Digital MFC Mass Flow Controller Gas N2 Range 5000 SCCM