Brooks Instrument MF Series Smart Mass Flow Controller
About this part
MF50S/AZ06 is a configured Brooks Instrument MF50S MF Series Smart Mass Flow controller identifier observed in stored Sonisys auction records. Official Brooks legacy and Smart Mass Flow documentation supports MF Smart Series / MF50S family context as elastomer-sealed smart thermal mass-flow-controller equipment, while the exact gas, calibration range, process connections, valve behavior, communication option, and approval package should be verified from the physical label or calibration paperwork. Stored auction records for this exact configured identifier include N2 context, with one title also stating 2 SLPM and 30 psig; those details are retained only as observed listing evidence
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
MF Series smart thermal mass flow controller
Series family
Brooks MF50S-MF64S Smart Mass Flow family; Brooks legacy listings place MF Smart Series under elastomer-sealed thermal mass flow controllers
Configuration
Configured-unit rule
Gas, full-scale range, calibration, process connection, seal package, valve option, power, communication, and area classification vary by configured model code and unit label
Flow
MF50S family range context
MF50S/MF60S family documentation lists 0.003 to 30 ln/min full-scale flow range context depending on configuration and calibration
Enclosure
Environmental protection
MF Series documentation identifies weatherproof IP65 and NEMA 4X protection context
Hazardous-area context
Zone 2 availability
MF Series documentation identifies CE and Zone 2 hazardous-area context for applicable configurations
Controls
Control platform
Brooks MF Series Smart Mass Flow controllers use microprocessor-based smart electronics and adaptive control
Communications
Signal and digital options
MF Series and Smart Mass Flow documentation describes selectable analog I/O and digital communication options such as RS-232, RS-485, and Profibus-DP depending on configured option
Diagnostics
Self diagnostics
Smart Mass Flow documentation describes self-diagnostics and programmable calibration-curve storage
Applications
Application domain
Industrial, biotech, outdoor, process gas-flow, and semiconductor gas-flow control applications requiring weatherproof mass flow instrumentation
Observed variants
Stored auction gas/range combinations
Stored Sonisys auction titles for this exact configured identifier include N2 context; one title also states 2 SLPM at 30 psig. These are observed listing details, not official model-wide specifications
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,775.00Based on archived listing records
Recorded price range$1,299.99 - $2,250.00Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,394.99 to $2,155.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
New Brooks Mass Flow Unit MF50S/AZ06 N2 Gas 30psig 2 SLPM Warranty 🇺🇸
Brooks SLAMf Thermal Mass Flow MF50S/AZ06 SLAMF5031GJB1A2A1 , Gas: N2 - New
