Flow Control
GP200-200787
Brooks Instrument GP200 Series Pressure-Based Mass Flow Controller
About this part
GP200-200787 identifies a Brooks Instrument GP200-series gas mass flow controller. The GP200 platform is metal-sealed, digital, and designed for ultra-high-purity semiconductor gas delivery. It measures flow with a true differential-pressure sensor across a laminar flow element and uses a downstream control-valve architecture. Brooks does not decode the six-digit 200787 suffix in its published ordering tables; the exact gas, range, bin, fitting, valve, communication interface, pressure configuration, and customer-specific options therefore require the unit’s full label code or a manufacturer configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Series | GP200 |
| Part identifier | GP200-200787 |
| Product class | Metal-sealed, digital, ultra-high-purity pressure-based mass flow controller for gases |
| Measurement principle | True differential-pressure measurement across a laminar flow element |
| Valve architecture | Normally closed downstream control valve; published choices include a positive shut-off/zero-leak valve and a metal-seat valve |
| Full-scale flow range | 3 to 50,000 sccm, N2 equivalent; configured-unit range is not established for GP200-200787 |
| Process-gas accuracy | Less than ±1% of setpoint from 5% to 100% full scale; below 5% full scale, less than ±0.05% full scale over the valve-specific control range |
| Control range | Zero-leak valve: 0.5% to 100% full scale; metal-seat valve: 2% to 100% full scale |
| Repeatability and reproducibility | ±0.15% of setpoint from 5% to 100% full scale; ±0.015% full scale over the valve-specific low-flow range |
| Matched transient response | 280 ±20 ms for ascending or descending non-zero setpoints; faster response is available by customer special request |
| Supply-pressure disturbance performance | Flow remains within less than ±1% of setpoint during inlet-pressure spikes up to 40 psi/second |
| Operating temperature | 10°C to 60°C; re-zeroing at ambient operating temperature is required |
| Operating inlet pressure | Configuration- and gas-dependent: below 15 psia for applicable low-pressure bins, or nominal ranges of 15–30, 25–40, 35–50, or 45–60 psia |
| Operating outlet pressure | Vacuum to atmosphere; positive-pressure configurations support up to 1200 Torr in applicable installations |
| Design pressure | 150 psia |
| Burst pressure | 1000 psia |
| External leak integrity | 1 × 10^-10 atm·cc/second helium |
| Wetted materials | 316L, 316/316L stainless steel, 304 stainless steel, Hastelloy C-22, KM-45, and PCTFE |
| Wetted surface finish | 5 microinch Ra average |
| Communication options | DeviceNet, EtherCAT, RS485 L-Protocol, and 0–5 V analog; interface is model-specific |
| Diagnostics | Top-mounted rotatable LCD plus an independent RS485 service port through micro-USB |
| Applications | Ultra-high-purity semiconductor gas control, including etch and chemical vapor deposition processes |
What Does GP200-200787 Mean?
Only the GP200 segment is defined by Brooks’ public model-code documentation. The hyphenated six-digit suffix is not the published ordering-code format and cannot safely be used to infer configuration.
| Segment | Field | Interpretation |
|---|---|---|
| GP200 | Base model | Brooks ultra-high-purity pressure-based mass flow controller. |
| 200787 | Manufacturer configuration or part suffix | Not decoded in the published GP200 model-code tables. It does not establish gas, range, bin, fitting, valve, communication, pressure, or customer-specific options. |
Published GP200 Configuration Fields
A complete GP200 ordering code contains configuration fields that are not exposed by the identifier GP200-200787.
| Field | Published choices | GP200-200787 status |
|---|---|---|
| Valve configuration | P: positive shut-off/zero-leak; C: normally closed metal-seat | Not established |
| Gas and range | Published standard N2-equivalent codes span 10 to 45,000 sccm; the current platform specification spans 3 to 50,000 sccm | Not established |
| Bin configuration | CT40–CT48 standard bins or LP40–LP46 low-pressure bins | Not established |
| Fitting | CX C-Seal, WX W-Seal, VS 1/4-inch male VCR, or LX C-Seal with poke-yoke | Not established |
| Communication and connector | EtherCAT, Analog/RS485, Analog-only, multiple DeviceNet profiles, or customer-defined DeviceNet | Not established |
| Customer special request | Four-character customer-specific field | Not established |
| Minimum inlet pressure | 15, 25, 35, or 45 psia field; applicable LP bins may operate below 15 psia | Not established |
| Downstream condition | Vacuum, atmosphere, or positive pressure | Not established |
| Auto shut-off | Included or not included | Not established |
| Reference temperature | 00C for standard 0°C reference calibration | Not established |
Installation and Service Notes
- Purge the gas supply line before installation, connect the device in the direction of the flow arrow, and leak-test the completed installation before operation.
- Allow at least 30 minutes of warm-up before performance checks.
- Confirm the active gas page and perform the prescribed zeroing procedure before evaluating flow performance.
- Do not connect unlabeled electrical pins; verify the mating cable pinout against the configured communication interface.
- For service after reactive-gas use, Brooks recommends factory cleaning and recalibration.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,201.26 to $1,201.26. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GP200-200787 Mass Flow Controller MFC AMAT 0190-93736 New