Flow Control
GP200-200534
Brooks Instrument GP200 Series Pressure-Based Mass Flow Controller
About this part
Brooks Instrument GP200-200534 is identified as a GP200 Series metal-sealed, digital, ultra-high-purity pressure-based mass flow controller for gas delivery in semiconductor processes. The GP200 platform uses differential-pressure measurement and a downstream control valve. The 200534 suffix is not defined in Brooks’ published GP200 ordering-code structure; the configured gas, range, valve, fitting, communications interface, pressure bin, and process-pressure options therefore require the unit label or full Brooks model code
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Product family | GP200 Series |
| Product type | Metal-sealed, digital, ultra-high-purity pressure-based mass flow controller for gases |
| Measuring principle | True differential-pressure measurement across a laminar flow element |
| Control architecture | Downstream, normally closed control valve |
| Full-scale flow range | 3 to 50,000 sccm, N2 equivalent; configured range is unit-specific |
| Process-gas flow accuracy | Zero-leak valve: <±1% of setpoint from 5–100% FS and <±0.05% FS from 0.5–5% FS. Metal-seat valve: <±1% of setpoint from 5–100% FS and <±0.05% FS from 2–5% FS. Analog control adds <±0.05% FS |
| Control range | Zero-leak valve: 0.5–100% FS; metal-seat valve: 2–100% FS |
| Repeatability and reproducibility | ±0.15% of setpoint from 5–100% FS; ±0.015% FS from 0.5–5% FS with the zero-leak valve or from 2–5% FS with the metal-seat valve |
| Transient response and settling time | 280 ±20 ms matched response for ascending or descending non-zero setpoints |
| Supply-pressure disturbance performance | <±1% of setpoint during an inlet-pressure spike up to 40 psi/second |
| Operating temperature | 10–60°C; re-zeroing at ambient operating temperature is required |
| Operating outlet pressure | Vacuum to atmosphere; up to 1200 Torr for supported applications |
| Differential-pressure range | 7 psid typical minimum; up to 50 psid maximum |
| Design pressure | 150 psia |
| Burst pressure | 1000 psia |
| Proof pressure | 100 psia for CT-bin devices, reduced to 70 psia for helium and helium mixtures; 45 psia for LP-bin devices |
| External leak integrity | 1 × 10^-10 atm·cc/s helium |
| Wetted materials | 316L, Hastelloy C-22, 316/316L stainless steel, 304 stainless steel, KM-45, and PCTFE |
| Surface finish | 5 µin Ra average |
| Available communications | DeviceNet, EtherCAT, RS485 L-Protocol with 0–5 V analog I/O, or 0–5 V analog-only; interface is model-specific |
| Embedded gas model | MultiFlo gas model supports dynamic gas and range reconfiguration within the device’s supported bin |
What Does GP200-200534 Mean?
Only the GP200 base-model segment is defined by Brooks’ public ordering structure. The numeric suffix is not a published configuration code.
| Segment | Field | Interpretation |
|---|---|---|
| GP200 | Base model | Brooks ultra-high-purity pressure-based mass flow controller |
| - | Separator | Separates the public family designation from the recorded part-number suffix |
| 200534 | Recorded suffix | Not defined as a field sequence in the published GP200 model code; it does not establish gas, range, valve, fitting, communications, pressure, or calibration options |
Published GP200 Configuration Fields
These are family ordering choices, not verified attributes of GP200-200534.
| Field | Published choices |
|---|---|
| Valve configuration | P: positive shut-off/zero-leak valve; C: normally closed metal-seat valve |
| Bin configuration | CT40–CT48 standard bins; LP40–LP46 low-pressure bins |
| Fitting | CX C-Seal; WX W-Seal; VS 1/4-inch male VCR; LX C-Seal with poke-yoke |
| Communications and connector | DeviceNet D-series options; E0 EtherCAT; G1 analog/RS485; TX analog-only |
| Minimum inlet pressure | 15, 25, 35, or 45 psia option |
| Downstream condition | V vacuum; A atmosphere; P positive pressure |
| Automatic shutoff | A included; X not included |
| Reference temperature | 00C: 0°C reference calibration |
Exact Configuration Boundary
A full Brooks model code or legible manufacturer label is required before assigning configured-unit specifications.
- Do not assert a configured gas or full-scale flow range from GP200-200534 alone.
- Do not assert the valve-seat type, fitting, seal, bin, communications interface, inlet-pressure option, downstream condition, automatic-shutoff selection, or calibration reference from the numeric suffix.
- Treat AMAT 0190-93736 as an observed associated marking until manufacturer or physical-label evidence establishes an exact cross-reference.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,211.24 to $1,211.24. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GP200-200534 Mass Flow Controller MFC AMAT 0190-93736 New