GF040CXXO-0039500C-VXVVS5-XXXXAX-00C is a configured Brooks Instrument GF040 Series thermal mass flow controller identifier. Brooks GF040 family documentation describes elastomer-sealed digital MultiFlo gas mass flow controllers and meters with configurable gas, range, valve, fitting, seal, and communication options. Sonisys auction history currently includes two tracked listing records for this exact configured code, both using Brooks Instruments flow-controller wording, and separate parts-index evidence reports a 280 SCCM range for this configured record. Verify gas, full-scale range, communication protocol, valve state, fittings, seals, and any customer-specific options from the physical label and Brooks documentation before reuse
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF040CXXO-0039500C-VXVVS5-XXXXAX-00C
Device type
Thermal mass flow controller
Series family
Brooks GF040 / GF40 Series
Seal platform
Elastomer-sealed GF040 family
Performance
GF040 family accuracy context
Brooks GF40 documentation describes 1% of set point accuracy for the GF40 Series
GF040 family response context
Brooks GF40 documentation describes sub-1 second settling-time context for the GF40 Series
Materials
Sensor material context
Brooks GF40 documentation describes a corrosion-resistant Hastelloy C-22 sensor
Controls
Communication interfaces
Brooks GF040 documentation includes analog and digital communication options including DeviceNet, EtherCAT, Profibus, and RS-485 variants depending on configuration
Flow
Gas/range programmability
MultiFlo gas and range programmability is associated with the GF40 platform on supported configurations
Observed configuration
Reported range evidence
A semiconductor parts-index entry for this exact configured code reports RANGE: 280 SCCM; verify against the physical unit label before using as an operating limit
Configuration
Configured-unit rule
Gas, full-scale flow, protocol, valve, fittings, elastomer materials, and customer-specific options vary by configured model code
Applications
Application domain
Process gas flow measurement and control for semiconductor, solar, CVD, biotech, nanotechnology, and industrial gas systems
