GF040CXXO-0015015L-VXVVS5-1015AX-00C is a configured Brooks Instrument GF040 Series elastomer-sealed thermal mass flow controller identifier. Official Brooks GF40 documentation identifies GF040 as an elastomer-sealed mass flow controller/meter family with MultiFlo capability on C-coded units, and its model-code table supports decoding this configured code as a normally open valve unit with oxygen gas code 0015, 15 slpm range code 015L, 1/4 in VCR fitting code VX, vacuum downstream-condition code V, Viton seal/seat code V, auto shut-off code A, and 0 C reference-temperature code 00C. The visible S5 communication/connector segment should be verified against the physical label or Brooks order record before reuse because the current table lists related S-protocol options with longer codes
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF040CXXO-0015015L-VXVVS5-1015AX-00C
Device type
Thermal mass flow controller
Series family
Brooks GF040 / GF40 Series
Seal platform
Elastomer-sealed GF040 family
Configuration
Model-code base
GF040 base-model code for elastomer-sealed 0-50 slpm range-flow platform
Configurability code
C code: MultiFlo capable; standard bins or a specific gas/range may be selected
Valve configuration code
O code: normally open valve
Configured-unit rule
Gas, full-scale flow, communication protocol, valve, fittings, elastomer materials, reference temperature, and customer-specific options vary by configured model code
Flow
Configured gas code
0015 code: oxygen (O2) per the Brooks GF40 gas table
Configured range code
015L code: 15 slpm configured range; verify calibration and operating limits against the physical unit label before reuse
Mechanical
Fitting code
VX code: 1/4 in VCR fitting
Process condition
Downstream condition code
V code: vacuum downstream condition
Materials
Seal and valve-seat code
V code: Viton external seals and Viton internal seals/valve seat
Primary wetted materials context
Brooks GF40 documentation lists 316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel as primary wetted materials for the family
Controls
Communication interfaces
Brooks GF40 documentation supports analog, RS485, DeviceNet, EtherCAT, and Profibus communication options depending on configuration; the exact S5 communication segment should be verified against the physical label or Brooks order record
Auto shut-off code
A code: auto shut-off included
Reference conditions
Reference temperature code
00C code: 0 C reference temperature
Performance
GF040 family accuracy context
Brooks GF40 documentation lists flow accuracy as +/-1% of set point from 35-100% and +/-0.35% of full scale from 2-35%
GF040 family response context
Brooks GF40 documentation lists normally closed valve settling time under 1 second and normally open valve settling time under 3 seconds, within 2% for step changes
Applications
Application domain
Process gas flow measurement and control for semiconductor, solar, CVD, biotech, nanotechnology, and industrial gas systems
