Brooks Instrument GF40 Series MultiFlo Mass Flow Controller
About this part
GF040CXXC is a Brooks Instrument GF40 Series configured-code prefix for elastomer-sealed digital thermal mass flow controllers and meters. Official Brooks GF40 documentation identifies GF040 as the elastomer-sealed 0-50 slpm N2-equivalent platform, the first C as MultiFlo-capable configurability, XX as the standard special-application field, and the final C as normally closed valve. Stored auction records include several longer GF040CXXC configurations, including N2 10 sccm, H2 10 sccm, air 5000 ccm, and N2/O2 contexts; exact gas, range, fitting, protocol, seals, reference temperature, and customer special request details require the complete configured model code and physical label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 / nitrogen at 10 sccm. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Elastomer-sealed digital thermal mass flow controller or mass flow meter
Series family
Brooks GF40 Series / GF040 base-model family
Base-model code
GF040: elastomer-sealed GF40 platform with 0-50 slpm nitrogen-equivalent range capacity
Configuration
Configurability code
C: MultiFlo capable, with standard bins or a specific gas/range selection
Special application code
XX: standard special-application field
Valve configuration
C: normally closed valve
Configured-unit rule
GF040CXXC alone identifies the base platform, MultiFlo capability, standard special-application field, and normally closed valve; gas, range, fitting, downstream condition, seals, protocol, customer special request, auto shut-off, and reference temperature require the full suffix
Flow
GF40 family full-scale flow range
3 sccm to 50 slm N2 equivalent
MultiFlo programmability
Standard MultiFlo gas and range programmability with 10 bins on supported GF40 configurations
Flow accuracy
+/-1% of set point from 35% to 100% of full scale; +/-0.35% of full scale from 2% to 35% of full scale
Repeatability and reproducibility
Less than +/-0.2% of set point
Linearity
+/-0.5% of full scale, included in accuracy
Control range
2% to 100% of full scale
Performance
Settling time
Normally closed valve less than 1 second within 2% for 0-10% through 0-100% steps; normally open valve less than 3 seconds within 2%
Valve shut down
Less than 1% of full scale
Zero stability
Less than +0.5% of full scale per year
Pressure coefficient
0.03% per psi from 0 to 50 psi on N2
Ratings
Operating temperature range
5 to 50 degrees C / 41 to 122 degrees F
Maximum operating pressure
150 psig / 10 bar
Design proof pressure
4000 psig / 275 bar
Differential pressure range
7-45 psid for 3-860 sccm, 15-45 psid for 861-7200 sccm, and 25-45 psid for 7201-50000 sccm; high-density gases such as argon may require additional differential pressure
Mechanical
Valve configurations
Normally closed valve, normally open valve, or no-valve meter depending on configured model code
Primary wetted materials
316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel at the GF40 family level
Seal and valve-seat options
Viton, Buna, Kalrez, or EPDM depending on configured model code
Surface finish
32 microinch Ra
External leak integrity
1 x 10^-9 atm cc/sec helium
Connections
Fitting options
9/16-18 UNF, tube compression, 1/4 in VCR, 1/4 in VCO, 1/4 in NPT, 1/4 in RC, 6 mm tube compression, and 10 mm tube compression options appear in the GF40 model-code table
Controls
Communication interfaces
Analog/RS-485, Profibus, DeviceNet, and EtherCAT variants depending on configuration
Analog input/output options
0-5 V, 0-10 V, 0-20 mA, and 4-20 mA options depending on protocol and connector package
Service port
GF40 platform includes a user-accessible service/diagnostic port for setup, troubleshooting, diagnostics, data logging, and configuration support
Compliance
Compliance context
GF40 documentation lists CE/EMC, safe-area design to EN61010-1, RoHS, leak-test traceability, oxygen cleaning, calibration traceability, and material certification options
Applications
Application domain
Gas flow measurement and control for OEM equipment, semiconductor processes, solar, biotech, nanotechnology, research systems, vacuum processes, and other industrial gas applications
Observed variants
Stored auction gas/range context
Stored titles include configured GF040CXXC variants for N2 10 sccm, H2 10 sccm, air 5000 ccm, N2 gas, and N2/O2 controller lots
