Brooks Instrument 5850E Series Mass Flow Controller
About this part
5850-E is a Brooks Instrument part-number/nameplate reference observed on configured 5850E Series thermal gas mass flow controller listings. Official Brooks 5800E/5850E documentation verifies the 5850E as an elastomer-sealed analog gas mass flow controller platform; gas, full-scale range, fitting, connector, valve state, and seal details remain configured-unit details that should be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as SiH4 at 200 sccm. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
5850-E
Device type
Thermal gas mass flow controller
Series context
Brooks 5800E / 5850E elastomer-sealed analog gas mass flow controller series
Configuration
Configured-unit rule
Gas, full-scale range, process fitting, connector, valve state, and seal package vary by configured model code and physical unit label
Flow
5850E standard range context
Brooks 5800E data sheet lists the 5850E controller model for nitrogen-equivalent full-scale ranges from 0.003 to 30 slpm
Performance
5850E accuracy context
Official 5800E data sheet lists +/-1% full-scale flow accuracy including linearity at calibration conditions
5850E repeatability context
0.25% of rate
5850E response time context
Less than 3 seconds settling time to within +/-2% full scale for a 0 to 100% command step
5850E control range context
50:1
Pressure
5850E pressure context
Official 5800E data sheet lists 1500 psi / 100 bar standard pressure rating for the 5850E / 5860E model group
Environmental
Operating temperature context
5 to 65 deg C (41 to 149 deg F)
Electrical
5850E input and output context
0 to 5 Vdc setpoint input and 0 to 5 Vdc output signal
5850E connector context
15-pin male D-sub connector or card-edge connector, depending on controller configuration
Materials
Seal and wetted-material context
Elastomer-sealed design with primary wetted materials listed by Brooks as 316L stainless steel, high-alloy stainless steel, Viton, Buna-N, Kalrez, and Teflon, depending on configuration
Applications
Application domain
Chemical and petrochemical research, laboratory and analytical systems, life-science bioreactors, solar, semiconductor, and other industrial gas-flow applications
