Wafer Robotics
WTM511-2-WFS02-V1
Brooks Automation WTM511-2-FWS02-V1 Wet-Process Wafer-Transfer Robot
About this part
This record corresponds to the Brooks Automation legacy PRI-Equipe WTM511-2-FWS02-V1 wafer-transfer robot assembly used in wet semiconductor-processing equipment. The supported exact configuration maps to Brooks assembly 6-0002-0705-SP, Applied Materials cross-reference 0190-08245, and customer application code 2105-CMP. The archived WFS02 spelling is a transposition: exact assembly inventories and independent equipment catalogs consistently identify the configuration as FWS02
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Supported model designation | WTM511-2-FWS02-V1 |
| Brooks assembly number | 6-0002-0705-SP |
| Applied Materials cross-reference | 0190-08245 |
| Manufacturer lineage | PRI-Equipe wafer-handling product supported under Brooks Automation |
| Equipment class | Wet-process semiconductor wafer-transfer robot |
| Customer application code | 2105-CMP |
| Documented integration context | Applied Materials CMP wet-process equipment |
Identifier reconciliation
The exact Brooks assembly and Applied Materials cross-reference consistently resolve to WTM511-2-FWS02-V1. WTM511-2-WFS02-V1 is retained as the archive lookup identifier, but it should not be presented as the manufacturer-supported model spelling.
Configuration boundary
The V1-CU configuration has separate Brooks and Applied Materials identifiers and is not an alias or documented replacement for this unit.
| Model configuration | Brooks assembly | Applied Materials cross-reference | Relationship |
|---|---|---|---|
| WTM511-2-FWS02-V1 | 6-0002-0705-SP | 0190-08245 | Exact configuration corresponding to this archive record |
| WTM511-2-FWS02-V1-CU | 6-0002-0706-SP | 0190-08246 | Separate suffix configuration; exclude from exact aliases |
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,339.10 to $8,859.90. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS 6-0002-0705-SP WAFER ROBOT WTM511-2-WFS02-V1 APPLIED MATERIALS 0190-08245