Wafer Robotics
WTM-511-2-FWS02-V1-CU
Brooks Automation Wet-Process Wafer-Transfer Robot
About this part
WTM-511-2-FWS02-V1-CU identifies a configured semiconductor wafer-transfer robot for wet-processing equipment. Exact-model records cross-reference Brooks assembly 6-0002-0706-SP and Applied Materials part number 0190-08246. Documented installations associate this configuration with copper CMP process modules; dimensions, motion performance, electrical requirements, controller compatibility, and wafer-size limits require unit-specific OEM documentation
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Configured model | WTM-511-2-FWS02-V1-CU |
| Brooks assembly part number | 6-0002-0706-SP |
| Applied Materials cross-reference | 0190-08246 |
| Product type | Wet-process semiconductor wafer-transfer robot |
| Documented process context | Wet-process and chemical-mechanical-planarization (CMP) equipment |
Configuration Cross-References and Replacement Checks
The -V1-CU configuration has different Brooks and Applied Materials identifiers from the similar -V1 assembly. Verify the complete model and assembly numbers before selecting a replacement.
Part Photos
10 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $2,503.25 to $2,503.25. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 6-0002-0706-SP Robot WTM-511-2-FWS02-V1-CU Untested As-Is
- Brooks Automation 6-0002-0706-SP Wet Robot WTM-511-2-FWS02-V1-CU Untested As-Is