Wafer Robotics
VTR-4
Brooks Automation VacuTran Wafer Transfer Robot
About this part
Brooks Automation VTR-4 identifies a legacy VacuTran vacuum wafer-transfer robot used in semiconductor process-tool automation. The robot transports wafers between stations within an evacuated processing system. Replaceable assemblies, arm sets, interface cables, controllers, and the CDM teach pendant carry separate identifiers; verify the physical unit label and controller interface before selecting a replacement
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Model designation | VTR-4 |
| Product family | VacuTran legacy vacuum-robot line |
| Equipment type | Vacuum wafer-transfer robot |
| Industry | Semiconductor process-tool automation |
| Function | Automated wafer transport between stations in a vacuum processing system |
| Replaceable-item identification | Use the physical assembly, robot, arm, cable, controller, or pendant part number; VTR-4 alone does not establish every replaceable component |
VTR-4 Identifier Relationships
VTR-4 is the robot/model context; related components retain their own identifiers.
| Identifier | Documented or observed role | Relationship to VTR-4 |
|---|---|---|
| VTR-4 / VTR4 | Legacy vacuum wafer-transfer robot designation | Exact page identifier |
| 1373501 | Assembly or control number paired with VTR-4 in secondary inventory records | Observed pairing only; do not assert as a universal robot part number |
| 11501-82 | Brooks-labeled MTR1 VacuTran robot model found in VTR-4 market context | Distinct physical-label model number |
| 001-1984 | Robot teach pendant or handheld controller | Related accessory; not an exact alias |
| 001-1863-01 | CDM VTR4-P5 interface cable | Related cable; not an exact alias |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $408.23 to $408.23. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Automation 001-1984 Robot Teach Pendant Controller VTR-4 Working Surplus