Wafer Robotics

VAC-407-2A

Brooks Automation / PRI-Equipe Vacuum Wafer-Handling Robot

About this part

VAC-407-2A identifies a legacy Brooks Automation / PRI-Equipe vacuum wafer-handling robot built on the VAC-407 platform. Brooks continues to list VAC-407 among its supported vacuum-robot refurbishment products. Exact-model records document installation in Varian and Applied Materials VIISta ion-implant systems, but wafer size and other build-specific options must be verified for each configured unit

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Automation / PRI Automation (Equipe)

Part numberVAC-407-2A

Product familyConfiguration-specific

Device typeWafer Handling Assembly

Configuration statusConfiguration varies

Application classWafer automation

CategoryWafer Robotics

Specifications

Identification

Model identifier	VAC-407-2A
Manufacturer lineage	Brooks Automation; legacy PRI Automation / Equipe platform
Product class	Vacuum wafer-handling robot

Manufacturer Family Data

VAC designation	Vacuum Robot
VAC-407 arm-link length	7.6 in; VAC-407 family value
VAC-407 Z stroke	1.4 in; VAC-407 family value

Configuration and Compatibility Boundary

Suffix -2ANo verified manufacturer decoding is available. Do not assert arm count, end-effector type, wafer capacity or another option from the suffix alone.

Observed integrationVarian / Applied Materials VIISta 80 HP, VIISta HE and VIISta 810 ion-implant systems.

Compatibility boundaryObserved installation does not establish plug-in compatibility across every VIISta revision or end-station configuration.

Wafer-size boundaryWafer size is build-specific and must be verified from the configured unit’s label or system documentation; market records do not establish one universal model specification.

Service-Relevant Construction

Exact-model refurbishment documentation identifies arm-link drive bands, R and T servo motors, Harmonic Drive assemblies, a top-flange vacuum-seal area and a ferrofluidic seal.
Service checks include vacuum leak testing, sensor and wiring verification, axis alignment, theta dead-zone checks and repeatability burn-in.

Part Photos

0 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$99.99Based on archived listing records

Recorded price range$99.99 - $99.99Low to high recorded listing price

Local documents0PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

[ROBOT] BROOKS PRI REPAIR ESC-201,ESC-204,ESC-212,ESC-218,ESC-222,VAC-407-2A

Archived listings

Other Part Numbers & Aliases

VAC-407-2AVAC 407-2AVAC407-2A