Flow Control
TICI4
Brooks Instrument / TiCl4 Mass Flow Controller
About this part
TICI4 is an archive key derived from listing text for a Brooks Instrument mass flow controller. The exact listing associates the unit with Brooks number 800-802-1003 Rev. 002, a 200 SCCM setting or range, and the process-fluid legend TICI4; official Brooks documentation identifies the corresponding chemical notation TiCl4 as titanium tetrachloride. Available evidence indicates that TICI4 is a rendering of a process-fluid marking rather than an official Brooks hardware model or order number. Controller family, construction, seal material, calibration conditions, electrical interface, and compatibility must be verified from the complete physical label and OEM records
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Archive identifier | TICI4 |
| Manufacturer context | Brooks Instrument mass flow measurement and control |
| Archive-key interpretation | The TICI4 token appears in exact listing text as a process-fluid legend; official Brooks gas tables use TiCl4 for titanium tetrachloride. It is not established as an official hardware model or order number |
| Associated Brooks number | 800-802-1003 appears with the archived TICI4 record and is independently described by exact-number resale records as a Brooks Instrument mass flow controller; this remains observed identity context rather than an OEM specification |
| Stored configuration wording | Rev. 002, TiCl4 process-fluid marking, and 200 SCCM appear together in stored exact-listing evidence; these details apply only to the observed listing configuration |
| Configured-unit rule | Controller series, revision, wetted materials, seal type, valve and sensor configuration, calibration gas and conditions, electrical interface, connector, pressure limits, and temperature limits vary by the complete configured unit |
| Verification boundary | Do not infer interchangeability or model-wide specifications from the TICI4 token, the 800-802-1003 customer or assembly number, the 200 SCCM listing wording, or family-level Brooks gas-conversion tables without a matching full label and OEM configuration record |
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $358.50 to $386.50. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS 800-802-1003 REV.002 MASS FLOW CONTROLLER,TiCI4,200SCCM