The SNST05 record corresponds to a Polycold 2XCL closed-loop gas chiller identified as Polycold part 700188-09, model 2XCL-3-SE², 480 VAC. It combines a water-cooled refrigeration circuit with a secondary compressor that continuously recirculates dry helium or nitrogen to cool a semiconductor wafer chuck or similar load
Configurations vary. Verify the exact unit before choosing a replacement.
Closed-loop refrigeration system with a recirculating secondary-gas circuit
Electrical
Input power supply
480 VAC, three-phase, 50/60 Hz
Acceptable voltage range
432–528 VAC
Full-load current
12 A
Circuit protection
16 A
Thermal performance
Cooling capacity
490 W at -40°C chuck outlet temperature and 20 SCFM gas flow
Gas circuit
Documented coolant gases
Dry helium or nitrogen with dew point below -80°C
Gas flow range
18–24 SCFM
Maximum supply pressure
90 psig
Connections
Gas inlet and outlet
1/2 in. × 6 in. Linde bayonet connectors
Cooling water
Inlet temperature
15–30°C
Minimum flow
3 gpm at 15°C; 6 gpm at 24°C; 10 gpm at 30°C
Connections
1/2 in. female NPT
Physical
Installed weight
Approximately 710 lb (322 kg)
Shipping weight
Approximately 910 lb (413 kg)
Environment
Ambient temperature
10–35°C
Ambient humidity
10–85% RH; maximum dew point 27°C
Maximum altitude
3,000 m
Heat rejection
Approximate rate
8,500 W (29,000 BTU/h)
Configuration Identity
Archive identifierSNST05
Manufacturer part number700188-09
Manufacturer model2XCL-3-SE², 480 V
Observed equipment contextLam Research/Novellus semiconductor process equipment
Operating and Installation Cautions
The 2XCL is phase-sensitive and requires clockwise phase rotation; incorrect rotation prevents operation.
The unit must be incorporated into the host equipment's emergency-off circuit.
Moisture in the recirculating gas freezes and can restrict flow. Use only the documented dry gases and maintain a dew point below -80°C.
When dry gas is not circulating, condensation can develop while the refrigeration stack is cold and for as long as four hours after shutdown. Cap the circuit or maintain a small dry-nitrogen purge as directed by the manual.
Cooling water must be connected and flowing before the unit is started.
Manufacturer Lineage
Polycold was a Brooks Automation cryogenic product line when the 2XCL documentation was issued. Edwards completed its acquisition of Brooks Automation's semiconductor cryogenics business, including the Polycold line, in July 2019.
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$12,500.00Based on archived listing records
Recorded price range$12,500.00 - $12,500.00Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $12,500.00 to $12,500.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
LAM RESEARCH SNST05 POLYCOLD CLOSED LOOP GAS CHILLER 2XCL BROOKS 700188-09
