SLAMF53 is a Brooks SLAMF Series elastomer-sealed digital thermal mass flow controller base model for high-flow gas control applications. Brooks documentation places SLAMF53 in the SLAMF53/63 body-size group with a 100 to 2500 slpm nitrogen-equivalent full-scale range family; stored Sonisys auction titles show configured examples for CO2, air, methane, carbon monoxide, nitrogen, and oxygen
Unit-specific configuration
Observed configuration
Historical listing records identify this part as CO2 at 250 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classIndustrial automation and process equipment
CategoryFlow Control
Specifications
Identification
Part identifier
SLAMF53
Device type
Elastomer-sealed digital thermal mass flow controller
Series family
Brooks SLAMF Series / SLAMf Series
Base model meaning
Brooks compliance documentation lists SLAMF53 as a mass flow controller; exact calibration, connection, seal, valve, and communication options depend on the full configured order code and unit label
Flow
SLAMF53/63 full-scale range family
100 to 2500 slpm nitrogen equivalent
Stored auction gas/range combinations
CO2 250 SLM, air 131 lb/hr, methane 150 SLPM, carbon monoxide 300 SLPM, nitrogen 300/1500/2500 SLPM, and oxygen 200 SLPM were observed in stored Sonisys auction titles
Performance
Flow accuracy
SLAMF Series data sheet lists 17025-certified flow accuracy of +/-0.6% of setpoint from 20% to 100% full scale and +/-0.12% full scale below 20% full scale; non-17025 stated accuracy is +/-0.9% of setpoint and +/-0.18% full scale below 20% full scale
Repeatability and reproducibility
0.20% of setpoint
Control range
100:1 for full-scale ranges from 1 to 50 slpm nitrogen equivalent; 50:1 for other full-scale flows
Pressure
Maximum operating pressure
SLAMF53/63 standard maximum operating pressure is listed as 1000 psi / 69 bar
Valve
SLAMF53 valve design
The SLAMF53 MFC uses a dual-stage pilot-operated valve; controlled startup and venting are important to avoid pressure-spike damage to the bellows spring, diaphragm, or bellows O-ring seal
Controls
Communication options
SLAMF Series configurations include analog I/O, RS-485, DeviceNet, Profibus, EtherNet/IP, and PROFINET options depending on the full model code
Diagnostic/service port
RS-485 service port via 2.5 mm jack
Materials
Wetted materials
316 and 316L stainless steel, high alloy, stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, Teflon/Kalrez, and EPDM are listed for the SLAMF Series family
Environment
Enclosure and applications
SLAMF Series instruments are designed for hosedown, washdown, harsh production, hazardous-area, chemical, petrochemical, laboratory, analytical, fuel-cell, biotechnology, and life-science gas-flow applications
Available certifications
IP66 and hazardous-area certifications are available depending on configuration
Trade
Brooks compliance listing
Brooks compliance documentation lists SLAMF53 as a mass flow controller with HTS 9032.89.6060, ECCN EAR99, country of assembly/manufacturing US
Configuration
Interchangeability caution
Do not assume interchangeability with another SLAMF53, SLAMF63, SLA5853, or other SLAMF-family unit without checking gas calibration, full-scale flow, pressure conditions, body, process connection, valve type, power, communication protocol, approvals, and installed system requirements
