Brooks Instrument SLA7900 Series Metal-Sealed Mass Flow Controller
About this part
SLA7951SZ204 is a configured Brooks Instrument SLA7900 Series metal-sealed thermal mass flow controller identifier. Brooks-authored SLA7900 documentation supplies family-level technical context for SLA7950-SLA7960 mass flow controllers and meters, while exact gas, full-scale range, pressure label, valve state, fittings, communication interface, and calibration remain configured-unit properties that should be verified from the physical unit label. exact-part auction metadata identifies this code as a Brooks Delta Class smart mass flow controller and includes N2O gas-media context, but No verified full-scale range is currently available for this exact part
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2O at Not verified. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
SLA7951SZ204
Device type
Configured high-purity metal-sealed thermal mass flow controller
Series family
Brooks SLA7900 Series; Brooks-authored family documentation covers Models SLA7950 through SLA7960 mass flow controllers and meters
Observed exact-code identity
Exact listing evidence identifies SLA7951SZ204 as a Brooks Delta Class smart mass flow controller
Configuration
Configured-unit rule
Gas, full-scale flow range, pressure label, process connections, valve behavior, communication interface, and calibration options vary by configured unit and should be checked from the unit label
Applications
Application domain
Advanced high-purity and ultra-high-purity gas handling systems, including semiconductor process gas flow measurement and control
Flow
Family flow-range capability
Brooks-authored SLA7900 data-sheet context lists ranges from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950-SLA7960 models
Observed exact-part gas context
Exact-part auction metadata lists N2O gas media for SLA7951SZ204; no reliable exact full-scale flow range was verified
Performance
Family accuracy context
Brooks-authored SLA7900 data-sheet context lists +/-1.0% of rate including linearity from 20% to 100% full scale and +/-0.2% full scale below 20% full scale
Family repeatability and response context
Brooks-authored SLA7900 data-sheet context lists +/-0.20% of rate repeatability and less than 1 second settling time for step changes above 5% full scale
Family long-term drift context
Brooks-authored SLA7900 data-sheet context lists long-term sensor drift performance below 0.2% per year
Pressure
Family pressure context
Brooks-authored SLA7900 data-sheet context lists 1500 psig maximum operating pressure, with 150 psig and below recommended for best performance
Leak integrity
Family metal-seal context
Brooks-authored SLA7900 data-sheet context lists all-metal seals and inboard-to-outboard leak integrity less than 1 x 10^-10 atm scc/sec helium maximum
Brooks-authored SLA7900 data-sheet context identifies 316L VAR stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve-seat material for documented family configurations
Family wetted-surface context
Brooks-authored SLA7900 data-sheet context describes wetted surfaces as electropolished to 5 Ra for documented family configurations
Connections
Process connection family
Brooks SLA7900 documentation shows VCR and downport seal connection configurations for SLA7900 family variants; exact fitting package should be verified from the unit label and body
Controls
Communication interface context
Brooks SLA7900 family documentation includes analog I/O, RS-485, and DeviceNet communication options; the exact SLA7951SZ204 interface should be verified from the unit label and connector
Electrical
Family power context
Brooks-authored SLA7900 documentation lists 13.5 to 27 VDC power for analog I/O versions and DeviceNet power over an 11 to 25 VDC range
Environment
Family operating ambient context
Brooks-authored SLA7900 data-sheet context lists operating ambient temperature from 0 C to 65 C and non-operating ambient temperature from -25 C to 100 C
Cleanliness
Family particulate context
Brooks-authored SLA7900 data-sheet context lists zero particles per cubic foot greater than 0.1 microns under process conditions and less than 4 particles per cubic foot greater than 0.02 microns under process conditions
Functionality
Calibration storage
Brooks-authored SLA7900 family context describes storage and pre-programming of up to 10 gas calibrations or ranges on a single device
