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Flow Control
SLA7950D1EGG1A2A1
Brooks Instrument SLA7900 DeviceNet Metal-Sealed Mass Flow Controller
About this part SLA7950D1EGG1A2A1 is a configured Brooks Instrument SLA7950D / SLA7900 Series high-purity, metal-sealed thermal mass flow controller identifier. The D model family is associated with DeviceNet configurations, while exact gas, range, fittings, valve behavior, and calibration details remain configured-unit properties. Sonisys auction history for this exact code shows AR 3000 SCCM context
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AR at 3000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
Documents
Images
Listing history
Aliases
Related
Key Facts
Manufacturer Brooks Instrument
Part number SLA7950D1EGG1A2A1
Product family SLA7900 Series
Device type Mass Flow Controller
Observed gas AR
Observed full-scale range 3000 SCCM
Configuration status Verify from unit label
Application class Semiconductor/high-purity gas delivery
Category Flow Control
Specifications
Identification
Device type High-purity metal-sealed DeviceNet thermal mass flow controller Series family SLA7900 Series Related documented models Brooks Models SLA7950 and SLA7960 mass flow controllers and meters DeviceNet model context SLA7950D is documented as a DeviceNet family variant of the SLA7900/SLA7000 platform
Configuration
Configured-unit rule Gas, full-scale range, process connection, valve state, DeviceNet setup, and calibration options vary by configured model code and nameplate
Applications
Application domain Advanced high-purity and ultra-high-purity gas handling systems, including semiconductor process gas flow measurement and control
Flow
Series flow range capability Any range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models Observed configured range Stored auction titles for this exact code show AR 3000 SCCM
Performance
Accuracy +/-1.0% of rate including linearity from 20% to 100% full scale; +/-0.2% of full scale below 20% full scale Repeatability +/-0.20% of rate Settling time Less than 1 second for step changes above 5% full scale
Pressure
Maximum operating pressure 1500 psig maximum; 150 psig and below recommended for best performance
Leak integrity
Inboard-to-outboard leak rate Less than 1 x 10^-10 atm scc/sec helium maximum
Materials
Wetted materials 316L Vacuum Arc Remelt stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve seat Wetted surface finish Electropolished to 5 Ra
Connections
Process connections 1/4 inch male VCR, CS seal, C seal, and W seal configurations depending on ordered model
Controls
DeviceNet interface SLA7950D family variants use DeviceNet communication; listing records commonly identify 1/4 inch VCR DeviceNet configurations DeviceNet connector context SLA7000/SLA7900 DeviceNet variants are documented with a 5-pin Micro-Connector and ODVA mass-flow-controller profile support
Electrical
DeviceNet power requirement with valve 6.3 W typical, 6.9 W maximum for DeviceNet family variants
Environment
Operating ambient temperature 0 C to 65 C (32 F to 149 F) Non-operating ambient temperature -25 C to 100 C (-13 F to 212 F)
Functionality
Calibration storage Device can store 10 selectable calibration and flow ranges
Observed variants
Stored auction gas/range combinations AR 3000 SCCM (2)
Documentation Downloads
Local PDF copies
Part Photos
5 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records 2 Tracked historical listing records
Historical median price $134.99 Based on archived listing records
Recorded price range $134.99 - $134.99 Low to high recorded listing price
Local documents 3 PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $134.99 to $134.99. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks SLA7950D Digital MFC Mass Flow Controller 1/4" VCR Device Net (Ar / 3L)
Brooks SLA7950D1EGG1A2A1 3000 SCCM Delta Class Mass Flow Controller AR Gas
Other Part Numbers & Aliases
SLA7950D1EGG1A2A1 SLA7950D1 EGG1A2A1 Brooks SLA7950D1EGG1A2A1 Brooks Instrument SLA7950D1EGG1A2A1 Brooks SLA7950D1 EGG1A2A1
