Flow Control
SLA7950D
Brooks Instrument SLA7900 DeviceNet Metal-Sealed Mass Flow Controller
About this part
SLA7950D is a Brooks Instrument SLA7900 Series metal-sealed digital thermal mass flow controller or meter model associated with DeviceNet digital I/O configurations. Brooks-authored SLA7900 documentation identifies SLA7950D DeviceNet variants with VCR and downport connection drawings, while gas, full-scale range, valve state, fitting package, and calibration remain configured-unit properties. Stored Sonisys auction evidence for this exact model includes Hydrogen 200 SCCM, AR 200 SCCM, AR 2 SLM, AR 3 SLM, AR 50 SCCM, SiH4 2 SLM, NF3 1.5 SLM, and WF6 30 SCCM observed configurations
Unit-specific configuration
Observed configuration
Historical listing records identify this part as HYDROGEN at 200 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberSLA7950D
Product familySLA7900 Series
Device typeThermal Mass Flow Device
Observed gasHYDROGEN
Observed full-scale range200 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | High-purity metal-sealed DeviceNet thermal mass flow controller or meter |
| Series family | Brooks SLA7900 Series; Brooks-authored family documentation covers Models SLA7950 and SLA7960 mass flow controllers and meters |
| DeviceNet model identity | SLA7950D is documented as the DeviceNet digital-I/O SLA7950 model variant, with VCR and downport connection layouts shown in the SLA7900 installation manual |
Configuration
| Configured-unit rule | Gas, full-scale flow range, process connections, valve behavior, DeviceNet setup, and calibration options vary by configured model code and unit label |
Applications
| Application domain | Advanced high-purity and ultra-high-purity gas handling systems, including semiconductor process gas flow measurement and control |
Flow
| Series flow range capability | Brooks-authored SLA7900 data-sheet context lists any range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models |
| Observed stored auction configurations | Hydrogen 200 SCCM (2), AR 200 SCCM (1), AR 2 SLM (1), AR 3 SLM (1), AR 50 SCCM (1), SiH4 2 SLM (1), NF3 1.5 SLM (1), WF6 30 SCCM (1) |
Performance
| Family accuracy context | Brooks-authored SLA7900 data-sheet context lists +/-1.0% of rate including linearity from 20% to 100% full scale and +/-0.2% full scale below 20% full scale |
| Family repeatability and response context | Brooks-authored SLA7900 data-sheet context lists +/-0.20% of rate repeatability and less than 1 second settling time for step changes above 5% full scale |
Pressure
| Family pressure context | Brooks-authored SLA7900 data-sheet context lists 1500 psig maximum operating pressure, with 150 psig and below recommended for best performance |
Leak integrity
| Family metal-seal context | Brooks-authored SLA7900 data-sheet context lists all-metal seals and inboard-to-outboard leak integrity less than 1 x 10^-10 atm scc/sec helium maximum |
Materials
| Family wetted-material context | Brooks-authored SLA7900 data-sheet context identifies 316L VAR stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve-seat material for documented family configurations |
| Family wetted-surface context | Brooks-authored SLA7900 data-sheet context describes wetted surfaces as electropolished to 5 Ra for documented family configurations |
Connections
| Process connections | Brooks-authored SLA7900 documentation shows SLA7950D DeviceNet variants with VCR and downport seal connection configurations; exact fitting package should be verified from the unit label and body |
Controls
| DeviceNet interface | SLA7950D family variants use DeviceNet digital communication; Brooks DeviceNet support material lists SLA7000 Series MFC documentation and SLA7800/SLA7900 EDS file context |
| DeviceNet connector context | SLA7000/SLA7900 DeviceNet variants are documented with a 5-pin Micro-Connector and ODVA mass-flow-controller profile support |
Electrical
| DeviceNet power requirement with valve | Brooks-authored SLA7900 data-sheet context lists 6.3 W typical and 6.9 W maximum for DeviceNet family variants with valve |
Environment
| Family operating ambient context | Brooks-authored SLA7900 data-sheet context lists operating ambient temperature from 0 C to 65 C and non-operating ambient temperature from -25 C to 100 C |
Cleanliness
| Family particulate context | Brooks-authored SLA7900 data-sheet context lists zero particles per cubic foot greater than 0.1 microns under process conditions and less than 4 particles per cubic foot greater than 0.02 microns under process conditions |
Functionality
| Calibration storage | Brooks-authored SLA7900 family context describes storage and pre-programming of up to 10 gas calibrations or ranges on a single device |
Documentation Downloads
Local PDF copiesPart Photos
24 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records9Tracked historical listing records
Historical median price$139.99Based on archived listing records
Recorded price range$99.99 - $185.99Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $99.99 to $177.19. Based on 9 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks SLA7950D Digital MFC Mass Flow Controller 1/4" VCR Device Net (Ar/200cc) 675903585864
- Brooks SLA7950D Digital MFC Mass Flow Controller 1/4" VCR Device Net (Ar / 2SLM)
- Brooks SLA7950D Digital MFC Mass Flow Controller Gas Hydrogen Range 200 SCCM
Archived listings
Other Part Numbers & Aliases
SLA7950DBrooks SLA7950DBrooks Instrument SLA7950D