Pressure Control
SLA7840AZ622
Brooks Analog Remote-Transducer Pressure/Flow Controller
About this part
Brooks SLA7840AZ622 is an analog SLA7840 remote-transducer controller. It uses an external pressure-transducer signal and adjustable PID electronics to regulate pressure with an integral co-planar valve while independently measuring mass flow. The A code establishes the analog interface; the undocumented Z622 suffix does not establish the configured gas, calibrated range, process connection, valve sizing, or control direction
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Base model | SLA7840A |
| Device type | High-purity, metal-sealed remote-transducer pressure/flow controller |
| Interface | Analog I/O |
| Electrical connector | 15-pin male D-sub connector |
| Setpoint input | 0–5 Vdc; accepts up to 5.5 Vdc, corresponding to 110% full scale |
| Flow output | 0–5 Vdc into a minimum 2 kΩ load; indication extends to 5.5 Vdc |
| Remote pressure-sensor input | 0–10 Vdc; accepts up to 10.2 Vdc; 480 kΩ nominal input resistance |
| Power supply | +15 Vdc ±5%; the traditional −15 Vdc pin is ignored |
| Power requirement | 3.6 W typical, 4.0 W maximum |
| Operating-mode selection | Mode-select pin 13 open: flow-control mode; pin 13 connected to signal common pin 10: pressure-control mode |
| Secondary-electronics compatibility | Brooks Model 0254 Series |
| Available full-scale flow ranges | Any range from 0–3 sccm through 0–30,000 sccm, nitrogen equivalent; exact configured range is not decoded by Z622 |
| Flow control range | 33:1 |
| Flow accuracy | ±1.0% of rate from 20% to 100% full scale; ±0.2% of full scale below 20% full scale |
| Flow repeatability | ±0.20% of rate |
| Flow settling time | Less than 1 second to within ±2% of full scale for a 0–100% step |
| Pressure range | Determined by the remote pressure transducer; 500 psig maximum |
| Pressure control range | 20:1 |
| Pressure settling time | Less than 1 second typical for a 20–100% setpoint step with no more than 2% overshoot; actual response is system-dependent |
| Maximum operating pressure | 500 psig |
| Leak integrity | Inboard-to-outboard helium leakage no greater than 1 × 10^-10 atm-scc/s |
| Ambient temperature | Operating: 0–60°C; non-operating: −25–100°C |
| Fluid temperature | 0–65°C |
| Mechanical platform | 1-1/8-inch-wide body |
| Valve technology | Co-planar control valve |
| Wetted materials | 316L vacuum-arc-remelt stainless steel, 316L stainless steel, and high-alloy ferritic stainless steel |
| Seals and standard valve seat | Nickel internal/external seals; standard 316L stainless-steel valve seat |
| Wetted surface finish | 32 µin Ra maximum |
| Process-connection choices | Standard 1/4-inch male VCR; C Seal, CS Seal, and W Seal were also offered. Z622 does not identify the exact connection |
| Stored calibrations | Up to 10 selectable gas calibrations and flow ranges |
What Does SLA7840AZ622 Mean?
The published model definition supports the SLA7840 and A segments. The remaining suffix requires a nameplate, calibration record, factory order record, or Brooks configuration record for further decoding.
| Segment | Field | Interpretation |
|---|---|---|
| SLA7840 | Product platform | High-purity, metal-sealed remote-transducer pressure/flow controller with integral mass-flow measurement |
| A | Electrical I/O variant | Analog interface using a 15-pin male D-sub connector, 0–5 Vdc setpoint and flow signals, and a +15 Vdc supply |
| Z622 | Configuration suffix | Not defined in the available manufacturer publications; do not assert gas, calibrated range, process connection, valve sizing, control direction, or customer option from this suffix alone |
Configuration and Service Notes
- The control-valve orifice is factory-sized for the ordered gas, inlet and outlet pressures, and flow range; service changes may require factory resizing and recalibration.
- Allow approximately one hour of powered warm-up before performing the documented analog operation check.
- Change between pressure-control and flow-control modes under no-flow conditions.
- Establish zero differential pressure across the controller before initiating the flow-sensor self-zero function.
Documentation Downloads
Local PDF copiesPart Photos
4 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $140.00 to $140.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Delta Class Smart Mass Flow Controller MFC Gas AR SLA7840AZ622
