Sensors and Gauges
SENTRY1510
Brooks Automation / Progressive Technologies Sentry 1510 Furnace Pressure Control System
About this part
The Sentry 1510 is a Progressive Technologies / Brooks Automation atmospheric diffusion-furnace pressure control system used to hold repeatable process pressures in semiconductor diffusion furnaces. It is a sealed system in which no metallic parts are exposed to the wetted gas path, making it compatible with corrosive process gases such as HCl, with hazardous materials confined to an isolated chamber and the house exhaust. The archived units include the 12027G02 and 11911G01 pressure control modules; the exact sub-assembly follows from the specific module part number and label
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Automation (Progressive Technologies) |
| Identifier | SENTRY1510 / Sentry 1510 |
| Observed control modules | Pressure control module part numbers 12027G02 and 11911G01 |
| Device type | Atmospheric diffusion-furnace pressure control system and modules |
| Sealed system (family) | No metallic parts exposed to the wetted gas path |
| Chemical compatibility (family) | Compatible with corrosive gases including HCl; hazardous materials confined to an isolated chamber and house exhaust |
| Function (family) | Maintains repeatable process pressures in atmospheric diffusion furnaces |
| Mounting (family) | Vertical or horizontal mount |
Sentry 1510 assembly context
The Sentry 1510 is a furnace pressure control system; the archived evidence records specific control-module part numbers within it.
Documentation Downloads
Local PDF copiesPart Photos
20 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $880.00 to $3,279.60. Based on 7 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 18047 BROOKS AUTOMATION PRESSURE CONTROL MODULE, P/N: 11911G01 SENTRY 1510