Brooks Automation / PRI Automation Atmospheric Wafer Pre-Aligner
About this part
PRE-301B-CE is a three-axis atmospheric semiconductor-wafer pre-aligner from the Equipe/PRI product line subsequently supplied under Brooks Automation. It optically measures the wafer edge, determines center offset and flat-or-notch orientation, and uses radial, theta, and vertical motion to center and orient the wafer for robotic transfer. The PRE-301 family supports 200 mm and 300 mm wafers, with 150 mm capability offered as an option, and is nominally configured for pin loading with a blade end effector
Configurations vary. Verify the exact unit before choosing a replacement.
ManufacturerBrooks Automation / PRI Automation / Equipe Technologies
Part numberPRE-301B-CE
Product familyConfiguration-specific
Device typeWafer Aligner
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics
Specifications
Identification
Exact model
PRE-301B-CE
Product line
Equipe/PRI PRE-300-series atmospheric pre-aligner
Function
Primary function
Determines wafer center and flat-or-notch orientation, then centers and rotationally orients the wafer for handling
Motion
Alignment axes
Three servo axes: radial axis for lateral centering, theta axis for chuck rotation, and vertical axis for raising and lowering the transfer pins
Wafer handling
Supported wafer sizes
PRE-301 family: 200 mm and 300 mm; 150 mm capability optional
Nominal loading arrangement
PRE-301 family: pin loading with a blade end effector; PRE-300/PRE-301 loading mode can be changed through pin-height software settings when the correct end effector is installed
Sensing
Edge-detection method
Non-contact optical measurement using LED illumination and linear CCD sensing
Fiducial detection
Automatic detection of wafer flats and notches
CCD pixel resolution
Atmospheric pre-aligner family: 10.7 µm
Chuck encoder resolution
Atmospheric pre-aligner family: 0.018°
Control
Controller requirement
Powered and operated through a Brooks Automation Smart Controller (ESC) or Dual Controller (EDC), selected according to the complete system axis count
Host interface
Controller provides RS-232C host control using ASCII commands; documented rates are 2,400, 4,800, 9,600, and 19,200 bit/s, with 9,600 bit/s as the default
Connections
Standard services
Motor power cable, motor signal cable, CCD data cable, and external vacuum connection
Vacuum
Recommended supply
-20 to -25 in Hg (approximately -67.7 to -84.7 kPa gauge)
Standard hose size
1/8-inch OD unless customized
Environment
Application environment
Cleanroom use; not intended for explosive mixtures, corrosive conditions, high humidity, or dusty environments
Operating temperature
15 to 32.5 °C (59 to 89 °F)
Shipping temperature
-20 to 40 °C (-4 to 104 °F)
Storage temperature
-25 to 55 °C (-13 to 131 °F), with up to 65 °C (149 °F) permitted for 24 hours
Relative humidity
10% to 80%, non-condensing
Regulatory
CE configuration
The -CE identifier denotes a CE-oriented configuration; the manufacturer manual directs users to confirm compliance from the CE mark on the individual unit
PRE-300 and PRE-301 model relationship
The manufacturer manual describes PRE-300 and PRE-301 as the same three-axis, large-wafer platform with different nominal loading setups. Loading type can be changed through the documented pin-height settings when the corresponding end effector is installed.
Model family
Axes
Wafer sizes
Nominal load type
Nominal end effector
PRE-300
Three
200 and 300 mm; optional 150 mm
Chuck loading
Horseshoe
PRE-301
Three
200 and 300 mm; optional 150 mm
Pin loading
Blade
Alignment operation
During alignment, the chuck rotates the wafer between an LED source and a CCD array. The controller correlates encoder position with the measured wafer edge, calculates the center-offset vector and flat-or-notch angle, uses the radial and vertical pin mechanisms to center the wafer, and rotates the chuck to the programmed orientation.
Integration and safety notes
The pre-aligner requires its external Brooks controller for operating power, motor drive, optical-data processing, and host communications.
An external vacuum source is required for the chuck and pin circuits.
The pre-aligner does not include an Emergency Machine Off device; the equipment integrator is responsible for the EMO circuit.
A complete mechanical alignment check is required at initial installation, after replacement or relocation, and following a wafer-transfer error.
Only qualified personnel should operate or maintain the mechanism.
Part Photos
9 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records3Tracked historical listing records
Historical median price$6,250.00Based on archived listing records
Recorded price range$1.99 - $8,499.99Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,251.59 to $8,049.99. Based on 3 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
BROOKS,PRI,EQUIPE PRE-301B-CE ALIGNER / TESTED / GOOD CONDITION / WORKING
Brooks Equipe PRI PRE-301B-CE Pre Aligner *used working
Archived listings
Other Part Numbers & Aliases
PRE-301B-CEBrooks PRE-301B-CEBrooks Automation PRE-301B-CEBrooks PRI PRE-301B-CEPRI Automation PRE-301B-CEEquipe Technologies PRE-301B-CE
