Flow Control
P3000073
Brooks Instrument (5850EMF5CABCGGA) 5 SCCM Argon Mass Flow Controller
About this part
Brooks Instrument P3000073 is the customer part number shown on model 5850EMF5CABCGGA, a metal-sealed thermal mass flow controller configured for 5 SCCM argon with a normally closed valve. The 5850EM platform is designed for stable, low-leak gas measurement and control in high-purity gas-delivery systems
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Customer part number | P3000073 |
| Brooks model code | 5850EMF5CABCGGA |
| Series | 5850EM |
| Calibrated gas | Argon |
| Flow rate | 5 SCCM |
| Valve action | Normally closed |
| Calibration reference temperature | 70°F |
| Manufacturer reference | 0104040258748002 |
| Measuring principle | Thermal mass flow |
| Documented flow ranges | Any range from 0–3 SCCM through 0–30,000 SCCM nitrogen equivalent; lower ranges available by consultation |
| Accuracy | 1% of full scale including linearity at calibration conditions; 1.5% of full scale for ranges above 20 SLPM |
| Repeatability | 0.25% of rate |
| Settling time | Less than 3 seconds to within 2% of full scale of the final value for a 0–100% command step with a normally closed valve |
| Control range | 2–100% with an elastomeric valve seat; 3–100% with a metal or Teflon valve seat. The exact seat option is not decoded |
| Ambient operating temperature | 5–65°C (40–150°F) |
| Leak integrity | 1 × 10^-10 atm-cc/sec helium maximum, inboard to outboard |
| Operating-pressure boundary | Family maximum 1,500 psi; 500 psi with the stainless-steel-fastener option. The 2008 manual specifies 150 psi for the enhanced-response option. Exact configured-unit pressure rating is not established |
| Differential pressure | Valve orifice sized for a 5–50 psi pressure drop; minimum depends on gas and range |
| Construction | Metal-sealed platform using 316L VAR, 316L, and high-alloy ferritic stainless steel; valve-seat material is configurable |
| Interface boundary | Analog platform; manufacturer documentation covers voltage- and current-I/O versions. The exact I/O and connector options are not decoded |
Configuration Boundary
The nameplate pairs customer part number P3000073 with Brooks model 5850EMF5CABCGGA. It establishes the argon calibration, 5 SCCM flow rate, 70°F reference temperature, and normally closed valve. No manufacturer ordering-code table was located for the complete suffix; fitting, valve-seat, surface-finish, electrical-I/O, power, and pressure options therefore require the original calibration record or an authoritative model-code record.
Installation and Gas-Service Notes
- Use an upstream filter to protect the sensor and control valve. The Brooks manual recommends a 1-micron filter for maximum flows through 100 SCCM, including this 5 SCCM configuration.
- Mount the controller in its final orientation and allow at least 20 minutes for temperature stabilization before checking zero.
- The controller may be installed in any position, but changing from the factory-calibration orientation can produce as much as a 0.5% full-scale shift after re-zeroing.
- The low-command cutoff prevents valve opening below 2% of full scale and is documented as active on all versions.
- Operating with a gas other than the calibrated argon produces a scale shift. Apply the appropriate conversion procedure or recalibrate before changing gas service.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 58050EM, 5850EMF5CABCGGA Mass Flow Controller 5 SCCM, P3000073