MTR5 identifies the Brooks Automation MultiTran 5, a dual-arm vacuum wafer-transfer robot for semiconductor cluster-tool automation. Manufacturer specifications describe digital motion control, a servo-motor and capstan drive, a ferro-fluidic rotational-axis seal, a dual frog-arm/band-joint mechanism, 875 mm reach, and 0.26 mm placement repeatability. The MTR5 designation does not identify the drive suffix, arm assembly, end effector, customer integration, or wafer-size configuration of a particular unit; replacement matching requires the complete label information
Configurations vary. Verify the exact unit before choosing a replacement.
Replacement matchingUse the complete Brooks part number and revision from the physical label
Arm and substrate configurationVerify the arm-assembly and end-effector numbers; observed 200 mm configurations do not establish a universal wafer size
Equipment integrationConfirm customer part numbers, controller, interfaces, clearances, and process-tool compatibility separately
Part Photos
19 images
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records9Tracked historical listing records
Historical median price$1,207.22Based on archived listing records
Recorded price range$99.99 - $6,500.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $420.00 to $6,500.00. Based on 9 archived listing records; not a current offer, appraisal, or confirmed sale price.
