Flow Control

MF5IA1BQ2G2EEA

Brooks Mass Flow Sensor

About this part

Brooks MF5IA1BQ2G2EEA is cataloged as an industrial mass flow sensor. Its calibrated gas, full-scale flow, reference conditions, process connections, wetted seals, electrical interface, and valve configuration are not established for this configured identifier; verify these details from the unit nameplate, calibration record, or Brooks factory documentation before installation or replacement

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (1)Photos (1)Listing history

Brooks Instrument MF5IA1BQ2G2EEA mass flow sensor auction image

Archived part photo · View gallery

Key Facts

ManufacturerBrooks Instrument

Part numberMF5IA1BQ2G2EEA

Product familyConfiguration-specific

Device typeMass flow sensor

Configuration statusConfiguration varies

Application classIndustrial automation and process equipment

CategoryFlow Control

Specifications

Identification

Manufacturer	Brooks Instrument
Exact identifier	MF5IA1BQ2G2EEA

Function

Device type

Mass flow sensor

Configuration

Calibrated gas	Not established for this configured identifier
Full-scale flow and reference conditions	Not established for this configured identifier

Mechanical

Process connections and wetted seals

Not established for this configured identifier

Electrical

Supply and signal interface

Not established for this configured identifier

Replacement

Exact replacement relationship

No exact drop-in replacement is documented

Identifier Handling

Retain MF5IA1BQ2G2EEA exactly as written. Brooks publishes nearby MF51, MF51S, and Mf51i designations, but these are not interchangeable identifiers. Do not substitute the uppercase I with digit 1 without a readable nameplate or Brooks factory record. Family-series similarity does not establish configuration or replacement compatibility.

Related Brooks Documentation Boundaries

Published Brooks families with similar designations have different documented ranges and construction. Neither family document identifies MF5IA1BQ2G2EEA as an exact configured unit.

Published platform	Documented models	Family-level details	Exact-part applicability
Mf i / Mf x Series	Controllers Mf50i, Mf51i, Mf53i; meters Mf60i, Mf61i, Mf63i	August 2009 data sheet: NEMA 4X/IP66 industrial packaging; removable sensor for Mfi and welded sensor for Mfx; Mf51/Mf61 family range 10–100 slpm nitrogen at 0°C and 101 kPa	Not established
MF Smart Series	Controllers MF50S, MF51S, MF53S; meters MF60S, MF61S, MF63S, MF64S	November 2008 manual: thermal mass-flow platform; MF51S/MF61S family range 20–100 ln/min nitrogen equivalent at 0°C and 1013.25 mbar	Not established

Documentation Downloads

Local PDF copies

Brooks Mf Series NEMA 4X and IP66 Mass Flow Controllers and Meters Data Sheet (DS-TMF-Mfi-Mfx-MFC-eng, August 2009) Local PDF download

PDF276 KB

Part Photos

1 image

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer

Archive records1Tracked historical listing records

Historical median price$172.49Based on archived listing records

Recorded price range$172.49 - $172.49Low to high recorded listing price

Local documents1PDF copies available from Sonisys

Recorded price context

The typical recorded price range is $172.49 to $172.49. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles

BROOKS MF5IA1BQ2G2EEA MASS FLOW SENSOR 07180413812

Archived listings

Other Part Numbers & Aliases

MF5IA1BQ2G2EEABrooks MF5IA1BQ2G2EEABrooks Instrument MF5IA1BQ2G2EEA