Brooks Instrument 1,000 SCCM HF Pressure-Based Mass Flow Controller
About this part
GP200P-7012001L-CT45CXE0-14547A-00C-1000 identifies a Brooks Instrument GP200 Series pressure-based mass flow controller configured with the P positive shut-off/zero leak-by valve, CT45 standard bin, CX 92 mm C-Seal body and E0 EtherCAT communications. The archived manufacturer label identifies HF service, a 1,000 SCCM configured range, 0°C/760 Torr reference calibration and Brooks part number GPEVAL-100044. The post-connector customer/application fields are not fully defined by the current model-code table; minimum inlet pressure, downstream condition and auto-shutoff behavior must therefore be confirmed from the complete label or a Brooks configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Part numberGP200P-7012001L-CT45CXE0-14547A-00C-1000
Product familyConfiguration-specific
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classIndustrial automation and process equipment
CategoryFlow Control
Specifications
Identification
Manufacturer
Brooks Instrument
Series
GP200
Brooks part number
GPEVAL-100044 (archived manufacturer label)
Configured unit
Process gas
HF (archived manufacturer label)
Full-scale range
1,000 SCCM
Reference calibration
0°C at 760 Torr
Bin configuration
CT45 standard bin configuration #45
Valve configuration
P — positive shut-off/zero leak-by valve
Mechanical
Fitting configuration
CX — 1-1/8-inch body width, 92 mm C-Seal
Communications
Interface
E0 — EtherCAT communication
Physical connections
Twin RJ45 EtherCAT ports; 5-pin M8 power connector
Observed unit
Firmware
4.02
Calibration date
24 March 2023
Transient response
280 ±20 ms
Proof pressure
100 psia
GP200 family ratings
Operating temperature
10–60°C
Design pressure
150 psia
External leak integrity
1 × 10^-10 atm·cc/s He
GP200 zero-leak platform performance
Published process-gas accuracy
<±1% of setpoint from 5–100% full scale; <±0.05% of full scale from 0.5–5% full scale
Published control range
0.5–100% of full scale
Published valve leak-by for bins 42–46
<0.005% of bin full scale at 45 psia to vacuum
GP200 family performance
Supply-pressure disturbance
Flow remains within <±1% of setpoint for inlet-pressure spikes up to 40 psi/s
What Does GP200P-7012001L-CT45CXE0-14547A-00C-1000 Mean?
The current Brooks model-code table defines the principal platform, valve, range, bin, fitting, communication and reference-temperature fields. Customer-special and application fields remain configuration-specific.
Segment
Field
Interpretation
GP200
Base model
Ultra-high-purity pressure-based mass flow controller.
P
Valve configuration
Positive shut-off/zero leak-by valve.
7012
Gas/model code
Exact configured code. The archived manufacturer label identifies the gas as HF; current public model-code tables do not independently define code 7012.
001L
Configured range
1,000 SCCM full scale, confirmed by the manufacturer label.
CT45
Bin configuration
Standard bin configuration #45. Brooks uses a 3,000 SCCM N2-equivalent reference configuration for CT45 sizing; this is not the configured HF range.
CX
Fitting
1-1/8-inch body width with 92 mm C-Seal downport fitting.
E0
Communications
EtherCAT communication.
14547A
Customer/application fields
Current documentation places customer-special, minimum-inlet-pressure, downstream-condition and auto-shutoff fields after the connector code, but this six-character string cannot be mapped unambiguously to the current standard sequence. Do not assert meanings for 7A without a Brooks configuration record.
00C
Reference temperature
0°C reference calibration.
1000
Archive identifier suffix
Matches the label's 1,000 SCCM range but is not defined as an additional ordering-code field in the current Brooks table.
