Flow Control
GF080CXXC
Brooks Instrument GF80 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF080CXXC is a Brooks Instrument GF80 Series configured-code prefix for metal-sealed digital thermal mass flow controllers and mass flow meters. Official Brooks GF80 documentation identifies GF080 as the metal-sealed GF80 platform with 0-55 slpm nitrogen-equivalent flow-range capacity, C as MultiFlo-capable configurability, XX as the standard special-application field, and the final C as a normally closed valve. Stored Sonisys auction records include GF080CXXC variants such as N2 860 SCCM, N2 280 SCCM, O2 20,000 ccm, and longer configured codes including GF080CXXC-0013011C-VXVZS5-XXXXXX-00C and GF080CXXC-0039008L-VXAMP5-XXXXAA-20C; exact gas, range, fittings, seal package, protocol, and reference conditions require the full configured model code and physical label
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF080CXXC
Product familyGF80 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Metal-sealed digital thermal mass flow controller or mass flow meter |
| Series family | Brooks GF80 Series / GF080 base-model family |
| Base-model code | GF080: metal-sealed GF80 platform with 0-55 slpm nitrogen-equivalent range capacity |
Configuration
| Configurability code | C: MultiFlo capable, with standard bins or a specific gas/range selection |
| Special application code | XX: standard special-application field |
| Valve configuration | C: normally closed valve |
| Configured-unit rule | GF080CXXC alone identifies the base platform, MultiFlo capability, standard special-application field, and normally closed valve; gas, range, fitting, protocol, valve/seal details, customer special request, and reference temperature require the full suffix |
Flow
| GF80 family full-scale flow range | 0-55 slpm N2 equivalent at the GF080 base-model level |
| MultiFlo programmability | Brooks GF80 documentation identifies fourth-generation MultiFlo gas and range programmability for multi-gas and multi-range configuration |
| Flow accuracy | GF80 documentation identifies 1% of set point accuracy context for the GF80/GF81 family; configured accuracy should be verified against the exact label and calibration |
| Control response | GF80/GF81 documentation identifies sub-1 second settling-time context for demanding gas-flow measurement or control applications |
Performance
| Zero stability | GF80/GF81 family documentation lists long-term zero stability below +0.5% full scale per year |
Ratings
| Operating temperature range | 5 to 50 degrees C / 41 to 122 degrees F |
| Maximum operating pressure | 150 psig / 10 bar for standard GF80/GF81 family context |
| Design proof pressure | 4000 psig / 275 bar |
| Differential pressure range | 3-860 sccm: 7-45 psid; 861-7200 sccm: 15-45 psid; 7201-50000 sccm: 25-45 psid; high-density gases such as argon may require additional differential pressure |
| External leak integrity | 1 x 10^-10 atm cc/sec helium at the GF80/GF81 family level |
Mechanical
| Valve configurations | Normally closed valve or meter/no-valve configurations are documented for GF80 family model-code options |
| Primary wetted materials | GF80/GF81 family documentation lists 316 stainless steel, Hastelloy C-22, 17-7 PH, and 430 stainless steel context |
| Sensor context | GF80/GF81 documentation identifies a corrosion-resistant Hastelloy C-22 sensor for long-term operation |
| Surface finish context | GF80 Series metal-sealed product context lists a 16 microinch Ra surface finish |
Controls
| Communication interfaces | GF80 documentation covers Analog/RS485, DeviceNet, Profibus, and EtherCAT variants depending on configured model code |
| Analog/RS485 connector context | The GF80 installation manual documents Analog/RS485 configurations with a 15-pin D-connector |
| DeviceNet connector context | The GF80 installation manual documents a 5-pin Micro M-12 DeviceNet connection for DeviceNet configurations |
| Service and diagnostics | GF80 documentation identifies diagnostic/service access and MultiFlo configurator support depending on configuration |
Applications
| Application domain | Gas flow measurement and control for OEM tools, process development, research systems, CVD, solar/thin film, biotech, nanotechnology, vacuum processing, and semiconductor gas applications |
Observed variants
| Stored auction gas/range context | Stored titles include N2 860 SCCM, N2 280 SCCM, O2 20,000 ccm, 15-O2 20,000 ccm wording, and configured GF080CXXC suffixes without reliable decoded gas/range values |
Documents
| Hosted official documentation | Sonisys hosts local copies of Brooks GF80 data sheet, GF80 installation manual, GF40/GF80 EtherCAT manual, GF40/GF80 DeviceNet manual, GF40/GF80 Profibus manual, and Brooks MultiFlo configurator guide |
Documentation Downloads
Local PDF copies
Brooks GF80 Series Data Sheet
Local PDF download
PDF1.4 MB
Brooks GF80 Series Installation Manual
Local PDF download
PDF5.3 MB
Brooks GF40/GF80 EtherCAT Manual
Local PDF download
PDF1.5 MB
Brooks GF40/GF80 DeviceNet Manual
Local PDF download
PDF1.3 MB
Brooks GF40/GF80 Profibus Manual
Local PDF download
PDF812 KB
Brooks MultiFlo Configurator Quick Start Guide
Local PDF download
PDF3.2 MB
Part Photos
27 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records13Tracked historical listing records
Historical median price$336.00Based on archived listing records
Recorded price range$1.00 - $2,499.99Low to high recorded listing price
Local documents6PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $175.11 to $1,944.80. Based on 13 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 1PC BROOKS GF080CXXC N2 860SCCM
- Brooks mass flowmeter GF080CXXC
- Brooks, GF080CXXC, 20000 ccm, O2 Gas, Mass Flow Controller, New
- Brooks, GF080CXXC, 20000 ccm, 15-O2 Gas, Mass Flow Controller, New
- Brooks Instrument Thermal Mass Flow Control GF080CXXC-0013011C-VXVZS5-XXXXXX-00C
- BROOKS GF080CXXC-0039008L-VXAMP5-XXXXAA-20C NEW
Archived listings
Other Part Numbers & Aliases
GF080CXXCBrooks GF080CXXCBrooks Instrument GF080CXXCBrooks GF80 GF080CXXCGF080CXXC Mass Flow ControllerGF080CXXC MFCGF080CXXC Mass FlowmeterGF080CXXC Thermal Mass Flow ControllerGF080CXXC-0013011C-VXVZS5-XXXXXX-00CGF080CXXC-0039008L-VXAMP5-XXXXAA-20CGF080C-100766