Accessories
GEN9
Brooks DAFA Internal and External Module
About this part
Brooks Automation GEN9 is a configured semiconductor automation service module for semiconductor/high-purity gas delivery.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Automation
Part numberGEN9
Product familyConfiguration-specific
Device typeSemiconductor automation service module
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryAccessories
Specifications
Identification
| Part identifier | GEN9 |
| Observed module family | DAFA internal and external module family |
| Observed brand lineage | Brooks Automation, Danaher Motion, Kollmorgen, and Servotronix names appear in stored and listing evidence |
| Observed Brooks part numbers | 115378, 115379, 134384, 155403, and 169238 appear in stored auction titles |
| Observed Kollmorgen / Servotronix part numbers | PRD-0057EXTA-02, PRD-0057EXTB-02, PRD-0057EXTz-02, PRD-0057INTB-02, PRD-0057INTC-02, PRD-0057INTz-02, and PRD-0057INTz-03 appear in stored and listing evidence |
| Observed PCB identifier | PCB-00573000-02 appears in stored listing evidence for a GEN9 DAFA internal module |
Configuration
| Configured-unit rule | Internal/external module type, revision, board assembly, connector condition, firmware, and tool compatibility vary by the physical unit and installed semiconductor automation system |
Applications
| Application domain | Semiconductor automation service parts, motion-control modules, and Brooks automation platform spares |
Documentation
| Documentation status | No manufacturer datasheet or installation manual for the exact GEN9 DAFA module is currently available in the Sonisys document archive |
Observed variants
| External-module evidence | Stored and listings describe GEN9 DAFA external modules under Brooks part numbers 115378, 115379, and 134384 with PRD-0057EXT or PRD-0057INTz-02 identifiers |
| Internal-module evidence | Stored and listings describe GEN9 DAFA internal modules under Brooks part numbers 115378, 155403, and 169238 with PRD-0057INT variants |
| Revision evidence | Stored listings include Rev F, Rev D/E, and lettered INT/EXT variants; revision must be checked from the board label |
Part Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records16Tracked historical listing records
Historical median price$175.00Based on archived listing records
Recorded price range$55.00 - $800.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $92.50 to $440.00. Based on 16 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks 134384, GEN9 DAFA External Module, Kollmorgen PRD-0057EXTB-02
- Brooks 169238 GEN9 Dafa Internal Mdle Servotronix Kollmorgen PRD-0057INTz-03
- Danaher Motion/Brooks Automation GEN9 DAFA 134384
- Brooks 169238 GEN9 Dafa Internal Module Servotronix Kollmorgen PRD-0057INTz-03
- NEW - Brooks GEN9 DAFA INTERNAL MODULE DANAHER Motion 115378 Kollmorgen H
- Brooks 115378 GEN9 Dafa Internal Module Servotronix Kollmorgen
Archived listings
Other Part Numbers & Aliases
GEN9Brooks GEN9Brooks Automation GEN9GEN9 DAFABrooks GEN9 DAFAGEN9 DAFA Internal ModuleGEN9 DAFA External ModuleDAFA Internal ModuleDAFA External ModuleDanaher Motion GEN9 DAFAKollmorgen GEN9 DAFAServotronix GEN9 DAFABrooks 115378Brooks 115379Brooks 134384Brooks 155403Brooks 169238PRD-0057EXTA-02PRD-0057EXTB-02PRD-0057EXTz-02PRD-0057INTB-02PRD-0057INTC-02PRD-0057INTz-02PRD-0057INTz-03PCB-00573000-02