The Tylan FM-360, cataloged as FM360, is an elastomer-sealed analog mass flow meter for gases. It provides a 0–5 VDC output proportional to flow and was cataloged with full-scale ranges from 10 sccm to 5 slm. Calibrated gas, full-scale range, fitting, and seal material are configured-unit attributes that are not established by the FM-360 base identifier
Configurations vary. Verify the exact unit before choosing a replacement.
Application classIndustrial automation and process equipment
CategoryFlow Control
Specifications
Identification
Manufacturer model
Tylan FM-360; manufacturer literature also writes FM360
Product
Device type
Elastomer-sealed gas mass flow meter
Performance
Catalog full-scale range
10 sccm to 5 slm; each configured unit has one calibrated full-scale range
Step response time
6 seconds, dependent on step request and operating conditions
Accuracy
±1% of full scale
Linearity
0.5% of full scale
Repeatability
±0.2% of full scale
Attitude sensitivity
Not sensitive; may be mounted in any position without zero adjustment
Gas service
Documented gases
Any gas with a known conversion factor; the calibrated gas of an individual unit must be identified from its label or calibration record
Pneumatic
Pressure drop
0.5 psid at full-scale flow
Maximum operating pressure
500 psig
Mechanical
Gas fitting sizes
1/8-inch or 1/4-inch, depending on ordered configuration
Construction materials
Type 316 stainless steel with Viton, Kalrez, or Neoprene seals depending on gas application; the exact seal is configuration-specific
Leak integrity
1 × 10^-9 atm cc/sec helium
Weight
454 g (1.0 lb)
Electrical
Analog output
0–5 VDC; 5 V represents full scale
Input power
+15 VDC ±4% at 25 mA maximum and −15 VDC ±4% at 25 mA maximum
Power consumption
1.5 W maximum
Minimum load resistance
2,000 ohms
Environmental
Temperature range
5–43 °C (40–110 °F)
Temperature coefficient
±0.1%/°C
Pressure coefficient
±0.007%/psi
Calibration
Standard reference conditions
0 °C and 760 mm Hg (14.7 psia), in accordance with SEMI E12-91
Lifecycle
Product status
Obsolete; Brooks Instrument lists Tylan FM-360 among obsolete mass-flow models
What Does FM-360 Mean?
FM-360 identifies the meter model, but it does not encode the complete calibrated configuration.
Segment
Field
Interpretation
FM
Product type
Flow meter designation; the ordering table places FM360 under Flow Meters rather than FC flow controllers.
360
Model member
Low-flow member cataloged for full-scale ranges from 10 sccm through 5 slm.
Not encoded by FM-360
Configured-unit options
Calibrated gas, full-scale flow, fitting, and seal material require the unit label or complete ordering record.
Documented Fitting Options
The exact fitting option cannot be selected from the FM-360 base identifier alone.
Code
Connection
2S
1/8-inch Swagelok
4S
1/4-inch Swagelok
4VCO
1/4-inch VCO
4V
1/4-inch VCR
Legacy and Replacement Service
Replacement selection must match the configured unit rather than the FM-360 base model alone.
LifecycleBrooks Instrument identifies Tylan FM-360 as obsolete.
Legacy-brand supportBrooks Instrument identifies Tylan among the legacy mass-flow brands it supports.
Replacement boundaryMatch calibrated gas and range, fitting geometry, seals, pressure rating, electrical supply, output, connector, and mounting dimensions before selecting a replacement.
