Wafer Robotics
EG-300B-009
Asyst 300 mm Wafer Aligner
About this part
EG-300B-009 is an Asyst Technologies wafer aligner for 300 mm semiconductor wafer-handling systems. It belongs to the Spartan EG-300B platform, which uses edge-grip alignment and wafer buffering. Match replacement units by the complete model and physical assembly label because the -009 configuration suffix is not publicly decoded
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Asyst Technologies, Inc |
| Product family | Spartan EG-300B |
| Model | EG-300B-009 |
| Component type | Wafer aligner / prealigner |
| Wafer diameter | 300 mm |
| Operating environment | Atmospheric semiconductor wafer handling |
Published EG-300B Family Characteristics
These characteristics describe the EG-300B platform. They are not proof of the installed options or calibration of every EG-300B-009 unit.
| Feature | Published family characteristic | Exact-unit boundary |
|---|---|---|
| Handling architecture | Edge-grip buffered wafer alignment | The exact -009 record verifies an aligner; its complete hardware configuration is not documented. |
| Centering accuracy | ±0.05 mm | Family-level equipment specification; do not assert as an individual unit's calibration result. |
| Notch-angle accuracy | ±0.075° | Family-level equipment specification; do not assert as an individual unit's calibration result. |
| Buffer function | Buffers a wafer to reduce robot idle time | Family-level; verify the buffer hardware on the configured unit. |
| OCR integration | Top- and/or bottom-reading OCR cameras were available in EG-300B system configurations | Optional/system-level; do not assert OCR on EG-300B-009 without physical or manufacturer configuration evidence. |
Manufacturer and Support Lineage
Asyst remains the manufacturer identity for EG-300B-009. Later corporate succession explains Brooks references associated with legacy systems but does not make this a Brooks-branded model.
Part Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Asyst EG-300B-009 300mm Aligner Wafer Robot Prealigner Brooks AMAT Controller