Wafer Robotics
ATM407B-1-S-CE
Brooks Automation Atmospheric Wafer-Handling Robot
About this part
The ATM407B-1-S-CE is a three-axis Brooks Automation atmospheric single-arm robot for semiconductor wafer transfer. Its documented configuration combines top mounting, a 17.3-inch Z stroke, the wide 7.2b-inch arm-link configuration, one vacuum line, cassette mapping/scanning, and the CE-mark option. End-effector details, controller model, firmware, and host-tool compatibility remain installation-specific
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Automation |
| Exact model | ATM407B-1-S-CE |
| Robot format | Atmospheric top-mount, single-arm wafer-handling robot |
| Motion axes | Three-axis polar motion: T (theta rotation), R (radial reach/retract), and Z (vertical) |
| Z stroke | 17.3 in (439.4 mm) |
| Arm-link configuration | 7.2b in designation; B denotes the wide-arm version |
| Vacuum configuration | One vacuum line |
| Mapping option | Cassette mapper/scanner |
| Regulatory option | CE-mark configuration |
| Documented wafer-size range | 75 to 300 mm (3 to 12 in); configured tooling may limit the usable range |
| Repeatability | ±25 µm at 3 sigma |
| Cleanroom rating | Class 1 |
| Operating temperature | 15 to 32.5 °C (59 to 89 °F) |
| Storage temperature | −20 to 40 °C (−4 to 104 °F) |
| Relative humidity | 10% to 80%, non-condensing |
| Maximum operating altitude | 1,000 m above sea level |
| Recommended vacuum source | 25 in Hg at greater than 1 SCFM free flow |
| Controller | External Brooks Smart Controller (ESC); the applicable controller and firmware are system-specific |
| Host interface documented by family manual | RS-232C ASCII command interface, nominally 9600 baud |
What Does ATM407B-1-S-CE Mean?
The manufacturer configuration matrix defines the mounting prefix, base mechanical configuration, and option suffixes.
| Segment | Field | Interpretation |
|---|---|---|
| ATM | Mounting and environment | Atmospheric Top Mount |
| 407B | Base mechanical configuration | 17.3-inch Z stroke with the 7.2b-inch wide-arm configuration |
| 1 | Vacuum configuration | Single vacuum line |
| S | Mapping option | Cassette mapper/scanner |
| CE | Regulatory option | CE-mark configuration |
Integration and Unit Verification
Controller, tooling, and compliance records must be matched to the physical unit and host system.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $99.99 to $99.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS ROBOT REPAIR 6-0000-3460-PC,6-0002-1300-SP,ATM407B-1-S-CE,6-0002-0555-SP