Wafer Robotics

ATM105-1-CE

Brooks Automation / PRI Wafer Handling Robot

About this part

ATM105-1-CE is a Brooks Automation / PRI / Equipe wafer-handling robot identifier observed in Sonisys auction records and exact-part surplus evidence. exact-identifier sources associate ATM105-1-CE and ATM-105-1-CE with Brooks or Equipe robot wording, and one surplus listing associates the configured unit with Brooks OEM part number 6-0002-1451-SP. Official Brooks pages verify the current semiconductor automation and wafer-handling manufacturer context, but no verified official exact Brooks PDF or exact manufacturer product page for ATM105-1-CE is currently available. End-effector, vacuum-line count, wafer-sensor option, controller pairing, cables, firmware, OEM tool fit, and CE/S2 configuration must be verified from the physical label and OEM service documentation

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Automation / PRI Automation / Equipe Technologies
Part numberATM105-1-CE
Product familyConfiguration-specific
Device typeWafer Handling Assembly
Configuration statusConfiguration varies
Application classWafer automation
CategoryWafer Robotics

Specifications

Identification
Part identifierATM105-1-CE
Separator variant observedATM-105-1-CE appears in exact-identifier sources; verify the physical label before using either separator style as a purchasing match
Observed manufacturer contextExact-identifier sources use Brooks Automation, Brooks, PRI, and Equipe Technologies wording for this robot identifier
Observed Brooks part-number contextSurplus evidence associates ATM105-1-CE with Brooks OEM part number 6-0002-1451-SP; treat this as observed unit context unless confirmed from the physical assembly label
Function
Observed device typeWafer-handling robot for semiconductor automation service context
Model-family context
ATM/ABM manual contextMirrored Brooks atmospheric single-arm robot manual content places ATM-105 in the ATM/ABM robot configuration matrix and defines ATM as atmospheric top mount; this is family context, not an official exact ATM105-1-CE datasheet
CE suffix contextMirrored Brooks atmospheric single-arm robot manual content lists CE Mark as an ATM/ABM option pattern; verify the physical unit label and declarations before treating CE wording as a compliance claim
Manufacturer context
Brooks automation contextBrooks pages describe Brooks as an automation supplier for semiconductor manufacturing, including material handling and substrate transport in controlled manufacturing environments
Configuration
Configured-unit ruleRobot revision, end-effector, vacuum-line count, wafer-sensor option, SEMI S2 or CE configuration, controller pairing, cable set, installed firmware, and host-tool compatibility vary by physical unit and installed system
Compatibility
Substitution cautionDo not assume interchangeability from ATM105-1-CE, ATM-105-1-CE, ATM-105, or 6-0002-1451-SP alone; match the full label, mechanical configuration, end-effector, sensors, cables, controller, and host-tool requirements
Documents
Documentation statusNo official exact ATM105-1-CE Brooks PDF or exact manufacturer product page is listed in the reviewed official Brooks pages or documentation portal

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$4,300.00Based on archived listing records
Recorded price range$99.99 - $8,500.00Low to high recorded listing price
Local documents0PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $939.99 to $7,660.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS REPAIR ESC-201B-CM,6-0002-1077,ATM105-1-CE,799-003427-001,6-0002-1110-SP
  • ATM105-1-CE Brooks Automation Robot

Archived listings

Other Part Numbers & Aliases

ATM105-1-CEATM-105-1-CEBrooks ATM105-1-CEBrooks Automation ATM105-1-CEBrooks Automation ATM-105-1-CEEquipe Technologies ATM-105-1-CE