Brooks Automation / PRI Atmospheric Top-Mount Wafer-Handling Robot
About this part
ATM-407B-2-S-CE-S293 is a configured Brooks Automation / PRI AXM 400-series wafer-handling robot. Its documented configuration combines top mounting, the 407B wide-arm geometry, dual vacuum circuits, cassette mapping, CE marking, and the SEMI S2-93 option. Manufacturer literature assigns the 407B a 0.68 kg (1.5 lb) payload and a nominal 13.3-inch Z stroke. The fitted end effector, scanner model, controller revision, firmware, cables, and serial-specific parameter file must be matched to the installation
Configurations vary. Verify the exact unit before choosing a replacement.
The manufacturer’s configuration matrix and AXM 400 literature decode the functional segments of the identifier.
Segment
Field
Interpretation
ATM
Mounting family
Atmospheric Top Mount
407B
Robot geometry
13.3-inch Z-stroke class with 7.2-inch wide-arm links
2
Vacuum option
Two vacuum circuits
S
Mapping option
Cassette mapper / scanner
CE
Regulatory option
CE-marked configuration
S293
Safety option
SEMI S2-93 configuration
Controller and Commissioning Requirements
The robot is one component of a controlled wafer-handling system; the full model code does not identify every required integration item.
Legacy controller architectureThe legacy AXM 400 brochure specifies the ESC-200 Series Equipe Smart Controller.
Exact controller boundaryThe exact ESC controller revision and firmware are not established by the robot identifier. Do not assert compatibility with an ESC-200, ESC-212, or another controller solely because those models appear in the same inventory.
Parameter fileThe manufacturer manual requires the robot’s serial-specific parameter file to be loaded into the controller and matched to the serial number on the robot body.
Integration checksConfirm controller firmware, parameter and macro files, cable pinout, end effector, vacuum plumbing, scanner model, station geometry, and interlock implementation before commissioning.
Generation 2 replacementMilara markets the current Equipe AXM 400 Generation 2 as a fully compatible direct replacement for Equipe Generation 1 robots; installation-specific interfaces and software still require verification.
Specification Boundaries
The configured model code establishes geometry and installed option classes, but it does not replace serial-specific manufacturing and acceptance records.
The 2004 AXM 400 brochure gives a nominal 13-inch Z range, while the 2005 manufacturer configuration matrix assigns ATM-407B to the 13.3-inch Z-stroke column. These are consistent as rounded versus detailed values; use 13.3 inches for this model code.
Manufacturer documents provide conflicting repeatability figures: the 2004 AXM 400 brochure lists typical radial and Z repeatability of ±0.002 inch at 3σ and theta repeatability of ±0.02°, while the 2005 family manual states ±25 µm at 3σ without an axis breakdown. Do not assert one exact-unit repeatability value without its dimensional drawing, quality report, or acceptance record.
CE and SEMI compliance should be confirmed from the unit marking and the applicable Declaration or Certificate of Conformity when required for installation.
The full code does not identify the fitted end-effector geometry, scanner sensor model, customer-specific station setup, cable set, controller revision, firmware, or serial-specific calibration.
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$3,999.00Based on archived listing records
Recorded price range$3,999.00 - $3,999.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $3,999.00 to $3,999.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
